Fabrication of LIGA-acceleration sensors by aligned molding A. BothW. BacherM. Strohrmann Technical Papers Pages: 104 - 108
Determination of Young’s modulus and residual stress of electroless nickel using test structures fabricated in a new surface micromachining process S. RoyS. FurukawaM. Mehregany Technical Papers Pages: 92 - 96
Light optical deformation measurements in microbars with nanometer resolution E. MazzaG. DanuserJ. Dual Technical Papers Pages: 83 - 91
Dimensional measurement of micro mechanical components with HAR U. BreitmeierG. Häusler Technical Papers Pages: 75 - 78
Studies of the adhesion properties of LIGA microstructures by X-ray spectroscopy and mechanical measurements D. KadereitJ. HormesA. El-Kholi Technical Papers Pages: 71 - 74
Tribological investigations of LIGA-microstructures T. BiegerU. Wallrabe Technical Papers Pages: 63 - 70
Synchrotron radiation analysis of microstructures N. MöldersH. O. MoserV. Saile Technical Papers Pages: 56 - 62
The effect of residual solvent on the profiles of thick positive DNO-photoresist for microsystem technologies J. SchulzT. MonoJ. Mohr Technical Papers Pages: 50 - 55
The copolymer of methyl methacrylate and methacrylic acid as a sensitive resist for deep-etch X-ray lithography T. NumazawaY. HirataH. Takada Technical Papers Pages: 46 - 49
Fabrication of stepped microoptical benches for fibre and free space applications A. MüllerJ. GöttertA. Rogner Technical Papers Pages: 40 - 45
International Conference on High Aspect-Ratio Microstructure Technology HARMST ’95 P. BleyW. MenzH. O. Moser Editorial Pages: 39 - 39
3D optimization of average torque of electrostatic micromotors T. B. JohanssonK. HameyerR. Belmans Technical Papers Pages: 98 - 103
Reliability of thermo-setting anisotropically conductive adhesives in Chip on Glass application J. LiuL. Ljungkrona Technical Papers Pages: 32 - 37
A system to measure 3-directional relative displacements for a biomedical application V. L. SpieringV. GassE. Morscher Technical Papers Pages: 88 - 92
Pb-based ferroelectric thin film actuator for optical applications M. SakataS. WakabayashiT. Yada Technical Papers Pages: 26 - 31
Finite element simulation of microstructure demolding as part of the LIGA process N. HuberCh. Tsakmakis Technical Papers Pages: 17 - 21
Biosensors for analytical microsystems U. WollenbergerR. HintscheF. scheller Technical Papers Pages: 75 - 83
Micromachined infrared pneumatic detector for gas sensor J. -B. ChévrierK. BaertA. Verbist Technical Papers Pages: 71 - 74
Niobium microelectrodes for submicron particle confinement R. LeoniM. G. CastellanoT. Muller Technical Papers Pages: 8 - 10
Electrocasting - formation and structuring of suspended microbodies using a.c. generated field cages S. FiedlerTh. SchnelleG. Fuhr Technical Papers Pages: 1 - 7
Micro- and integrated optical devices in glasses and polymers for hybride integration into microsystems W. KartheR. GöringT. Poßner Technical Papers Pages: 59 - 67
Glucose measurement using a micromachined open tubular heterogeneous enzyme reactor (MOTHER) D. J. StrikeP. ThiébaudN. F. de Rooij Originals Pages: 48 - 50
Process technology for the modular integration of CMOS and polysilicon microstructures James M. BustilloGary K. FedderRoger T. Howe Originals Pages: 30 - 41
Monte Carlo modelling of electron beam lithography: a scaling law G. MessinaS. SantangeloA. Tucciarone Originals Pages: 23 - 29
Experimental and numerical investigations of thermo-mechanically stressed micro-components B. MichelA. SchubertV. Grosser Originals Pages: 14 - 22
Technology tools for a high precision accelerometer in bulk micromechanics T. GeßnerE. VetterM. Wiemer Originals Pages: 10 - 13
