Fabrication flaws and reliability in MEMS thin film polycrystalline flow sensor M. T. BensidhoumM. LaghroucheJ. Boussey Review Paper 30 November 2013 Pages: 1 - 7
Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview M. A. FragaH. FurlanM. Massi Review Paper 14 December 2013 Pages: 9 - 21
Electro-thermal analysis of an embedded boron diffused microheater for thruster applications Pijus KunduTarun Kanti BhattacharyyaSoumen Das Technical Paper 06 March 2013 Pages: 23 - 33
Ion-enrichment and ion-depletion of nanochannels based on electrochemical potential in a micro-nanofluidic chip Jun-yao WangChong LiuYun-liang Liu Technical Paper 02 August 2013 Pages: 35 - 39
On the crystallinity of PVA/palm leaf biocomposite using DSC and XRD techniques Arunendra Kumar PatelR. BajpaiJ. M. Keller Technical Paper 14 July 2013 Pages: 41 - 49
Polymethylmethacrylate/polyethyleneglycol-based partially water soluble binder system for micro ceramic injection moulding Thomas HanemannOxana Weber Technical Paper 14 March 2013 Pages: 51 - 58
PMMA to Polystyrene bonding for polymer based microfluidic systems Yiqiang FanHuawei LiIan G. Foulds Technical Paper 29 March 2013 Pages: 59 - 64
Design and simulation of a novel metallic microgripper using vibration to release nano objects actively Hamed DemaghsiHadi MirzajaniHabib Badri Ghavifekr Technical Paper 31 July 2013 Pages: 65 - 72
Compact thermoelectric coupled models of micromachined thermal sensors using trajectory piecewise-linear model order reduction Ying LiuWeizheng YuanBinghe Ma Technical Paper 23 April 2013 Pages: 73 - 82
Micro-punching process of stainless steel foil with micro-die fabricated by micro-EDM Jie XuBin GuoXiang Fei Technical Paper 26 March 2013 Pages: 83 - 89
Design optimization of micromixer with square-wave microchannel on compact disk microfluidic platform Ju-Nan KuoLi-Ren Jiang Technical Paper 15 March 2013 Pages: 91 - 99
Design and fabrication of 3-dimensional helical structures in polydimethylsiloxane for flow control applications Rajeev Kumar SinghAvinash KumarShantanu Bhattacharya Technical Paper 06 February 2013 Pages: 101 - 111
Vertically aligned multi-walled CNT arrays coated by gold nanoparticles for surface-enhanced Raman scattering Jie ZhangYulin ChenYong Zhu Technical Paper 03 April 2013 Pages: 113 - 117
A rotary comb-actuated microgripper with a large displacement range Honglong ChangHaitao ZhaoWeizheng Yuan Technical Paper 24 January 2013 Pages: 119 - 126
Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process Pongsak KerdlapeeAnurat WisitsoraatAdisorn Tuantranont Technical Paper 21 May 2013 Pages: 127 - 135
Design and fabrication of a micromachined gyroscope with high shock resistance Jian ZhouTao JiangMing Wu Technical Paper 20 June 2013 Pages: 137 - 144
CMOS integrated elliptic diaphragm capacitive pressure sensor in SiGe MEMS Ananiah Durai SundararajanS. M. Rezaul Hasan Technical Paper 29 May 2013 Pages: 145 - 155
Theoretical and numerical investigations of an electroosmotic flow micropump with interdigitated electrodes Ujjal BarmanAshis K. SenSubhash C. Mishra Technical Paper 18 August 2013 Pages: 157 - 168
Galvanic deposition in partially conductive plastic molds for manufacture of finely detailed microcomponents Volker PiotterJürgen Prokop Technical Paper 19 April 2013 Pages: 169 - 174