Abstract
In this paper, a tuning fork gyroscope designed for high-g shock environments is presented. This micro gyroscope with 10 kHz designed working frequency is composed of double symmetrical frame structures that are connected by middle coupling beams. Two level elastic stoppers were designed in order to improve the shock resistance of the gyroscope. Slots were etched to reduce damping in the inner bonding regions. By bulk silicon micromachining technology, the gyroscope was fabricated on a 300 μm thickness silicon wafer. The working frequencies of the gyroscope on the driving and sensing modes are 10,240 and 11,160 Hz, respectively. Shock experiments to bare chips indicate that the shock resistance of the gyroscope along X-axis is 15,000 g, Y-axis is 14,000 g and Z-axis is 11,000 g.
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References
Tanner DM et al (2000) MEMS reliability in shock environments. Reliability physics symposium. In: proceedings of the 38th annual 2000 IEEE international 129–138. doi:10.1109/RELPHY.2000.843903
Alsaleem F, Younis MI, Miles R (2008) An investigation into the effect of the PCB motion on the dynamic response of MEMS devices under mechanical shock loads. Electron Packag Trans ASME 130(3):0310021–03100210. doi:10.1115/1.2957319
Brown TG (2003) Harsh military environments and microelectromechanical (MEMS) devices. In: proceedings of the IEEE Sensors 2: 753–760. doi:10.1109/ICSENS.2003.1279042
Chen Y et al (2005) A novel tuning fork gyroscope with high Q-factors working at atmospheric pressure. Microsyst Technol 11:111–116. doi:10.1007/s00542-004-0438-8
Chouvion B, Fox CHJ, William SM, Popov AA (2010) In-plane free vibration analysis of combined ring-beam structural systems by wave propagation. J Sound Vib 329:5087–5104. doi:10.1016/j.jsv.2010.05.023
Corigliano A, Cacchione F, Frangi A, Zerbini S (2008) Numerical modelling of impact rupture in polysilicon microsystems. Comput Mech 42(2):251–259. doi:10.1007/s00466-007-0231-5
Ghisi A, Fachin F, Mariani S, Zerbini S (2009) Multi-scale analysis of polysilicon MEMS sensors subject to accidental drops: effect of packaging. Microelectron Reliab 49(3):340–349. doi:10.1016/j.microrel.2008.12.010
Hartzell A, Woodilla D (1999) Reliability methodology for prediction of micromachined accelerometer stiction. In: proceedings of the reliability physics symposium, pp 202–205. doi:10.1109/RELPHY.1999.761613
Hartzell A, Silva MG, Shea HR (2011) MEMS reliability. New York, pp 85–110. doi:10.1007/978-1-4419-6018-4
Jiang T, Wang AL, Jiao JW, Liu GJ (2006) Detection capacitance analysis method for tuning fork micromachined gyroscope based on elastic body model. Sens Actuators A 128:52–59. doi:10.1016/j.sna.2006.01.007
Jiang T, Zhou J, Feng F (2012) Study on designs of stoppers for MEMS devices in shock environment. Appl Mech Mater 184(185):510–515. doi:10.4028/www.scientific.net/AMM.184-185.510
Kimberley J, Cooney RS, Lambros J, Chasiotis I, Barker NS (2009) Failure of Au RF-MEMS switches subjected to dynamic loading. Sens Actuators, A 154:140–148. doi:10.1016/j.sna.2009.06.004
Mariani S et al (2008) A three-scale FE approach to reliability analysis of MEMS. Meccanica 43:469–483. doi:10.1007/s11012-008-9111-0
Sang WY (2009) Vibration isolation and shock protection for MEMS. Dissertation, University of Michigan
Sang WY, Yazdi N, Perkins NC, Najafi K (2006) Micromachined integrated shock protection for MEMS. Sens Actuators A 130–131:166–175. doi:10.1016/j.sna.2005.12.032
Scaysbrook IW, Cooper SJ, Whitley ET (2004) A miniature, gun-hard MEMS IMU for guided projectiles, rockets and missiles. In: proceeding of the position location and navigation symposium, PLANS 26–34. doi:10.1109/PLANS.2004.1308970
Shi YB, Zhu ZQ, Liu XP, Du K, Liu J (2010) Design and impact analysis of a high-g accelerometer. Explos Shock Waves 30(3):329–332. doi:001-1455(2010)03-0329-04
Srikar VT, Senturia SD (2002) The reliability of microelectromechanical systems (MEMS) in shock environments. J Microelectromech Syst 11(3):206–214. doi:10.1109/JMEMS.2002.1007399
Stauffer JM (2006) Current capabilities of MEMS capacitive accelerometers in a harsh environment. IEEE Aerosp Electron Syst Mag 21(11):29–32. doi:10.1109/MAES.2006.284356
Sundaram S et al (2011) Vibration and shock reliability of MEMS: Modeling and experimental validation. J Micromech Microeng 21(4):1–13. doi:10.1088/0960-1317/21/4/045022
Wagg DJ (2002) Application of non-smooth modelling techniques to the dynamics of a flexible impacting beam. J Sound Vib 256(5):803–820. doi:10.1006/jsvi.2002.5020
Yang ZX, Huang Y, Li XX, Chen GN (2009) Investigation and simulation on the dynamic shock response performance of packaged high-g MEMS accelerometer versus the impurity concentration of the piezoresistor. Microelectron Reliab 49(5):510–516. doi:10.1016/j.microrel.2009.02.018
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This research is supported by National Natural Science Foundation of China under Grant No.51075305. This support is gratefully acknowledged. However, any opinions, findings or conclusions expressed in this paper are those of the authors and not necessarily reflect the views of the sponsor.
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Zhou, J., Jiang, T., Jiao, Jw. et al. Design and fabrication of a micromachined gyroscope with high shock resistance. Microsyst Technol 20, 137–144 (2014). https://doi.org/10.1007/s00542-013-1833-9
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DOI: https://doi.org/10.1007/s00542-013-1833-9