Atomic Layer Deposition in the Production of a Gate HkMG Stack Structure with a Minimum Topological Size of 32 nm K. V. RudenkoA. V. Myakon’kikhV. A. Gvozdev OriginalPaper 10 March 2018 Pages: 1 - 10
Simulating the Effects of Internal Mechanical Stresses on the Decomposition Kinetics of a Supersaturated Oxygen Solution in Silicon T. M. MakhviladzeM. E. Sarychev OriginalPaper 10 March 2018 Pages: 11 - 19
Simulation of Single Event Effects in STG DICE Memory Cells Yu. V. KatuninV. Ya. Stenin OriginalPaper 10 March 2018 Pages: 20 - 33
Visualization of Defects on the Semiconductor Surface Using a Dielectric Barrier Discharge D. V. SitanovS. A. Pivovarenok OriginalPaper 10 March 2018 Pages: 34 - 39
Studying the Thermodynamic Characteristics of Anodic Alumina A. I. Vorob’evaD. L. ShimanovichO. A. Sycheva OriginalPaper 10 March 2018 Pages: 40 - 49
Basic Techniques of Increasing Resolution of Photopolymerizable Compositions V. M. TreushnikovS. P. MolodnyakovV. V. Semenov OriginalPaper 10 March 2018 Pages: 50 - 64
A System for Logical Design of Custom CMOS VLSI Functional Blocks with Reduced Power Consumption P. N. BibiloN. A. AvdeevL. D. Cheremisinova OriginalPaper 10 March 2018 Pages: 65 - 81