Volume 12, Issue 1-2

January 2004

Special Issue on Electroceramics in Micro-Electro-Mechanical Systems

Issue Editor:

11 articles in this issue

Editorial
N. Setter
Editorial Introduction Pages: 5 - 6
Thin Film Piezoelectrics for MEMS
S. Trolier-McKinstry
P. Muralt
OriginalPaper Pages: 7 - 17
Electroceramic Thick Film Fabrication for MEMS
R.A. Dorey
R.W. Whatmore
OriginalPaper Pages: 19 - 32
Microfabrication of Piezoelectric MEMS
J. Baborowski
OriginalPaper Pages: 33 - 51
Submicrometer-Scale Patterning of Ceramic Thin Films
C.R. Martin
I.A. Aksay
OriginalPaper Pages: 53 - 68
Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics
M. Alexe
C. Harnagea
D. Hesse
OriginalPaper Pages: 69 - 88
Piezoelectric Microactuator Devices
R. Maeda
J.J. Tsaur
M. Ichiki
OriginalPaper Pages: 89 - 100
Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films
P. Muralt
J. Baborowski
OriginalPaper Pages: 101 - 108
RF Bulk Acoustic Wave Resonators and Filters
H.P. Loebl
C. Metzmacher
A. Tuinhout
OriginalPaper Pages: 109 - 118
Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices
O. Auciello
S. Saha
P. Baumann
OriginalPaper Pages: 119 - 131
MEMS for Optical Functionality
S. Kim
G. Barbastathis
H.L. Tuller
OriginalPaper Pages: 133 - 144

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