Skip to main content
SpringerLink
Log in

MEMS for Optical Functionality

  • Published:
Journal of Electroceramics Aims and scope Submit manuscript

Abstract

We discuss key features of MEMS technology which enable new functionalities of microphotonic devices, that can by summarized as “arrayability”, i.e. the ability to make massively parallel optical devices in a small form factor, “reconfigurability,” the ability to change optical properties spatially and temporaly, and “nano positioning,” the ability to position micro-scale devices with nanometer accuracy. We present an overview of cases where a combination of these features has led to commercial successes by creating new optical functionalities, and discuss materials-related challenges and future trends for optical MEMS research and commercialization.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. K.E. Petersen, Proc. IEEE, 70(5), 420 (1982).

    Google Scholar 

  2. P.F. Van Kessel, L. Hornbeck, R.E. Meier, and M.R. Douglass, Proc. of the IEEE, 86(8) (1998).

  3. S.G. Kim, K.H. Hwang, J. Hwang, M.K. Koo, and K.W, Lee, Journal of the Society of Information Display, 8(2) (2000).

  4. R.B. Apte, F.S.A. Sandejas, W.C. Banyai, and D.M. Bloom, Proc. Solid State Sensor and Actuator Workshop(1994).

  5. S. Horsley, 1st International Symposium on Nanomanufacturing(Cambridge, MA, 2003), http://nanoman.mit.edu

  6. M.C. Wu, L.-Y. Lin, S.-S. Lee, and K.S.J. Pister, Sensors and Actuators A: Physical, 50(1/2), 127 (1995).

    Google Scholar 

  7. L.Y. Lin, S.S. Lee, K.S.J. Pister, and M.C. Wu, IEEE Photonics Tech. Lett., 6(12), 1445 (1994).

    Google Scholar 

  8. M.E. Motamedi, M.C. Wu, and K.S.J. Pister, Optical Eng., 36(5), 1282 (1997).

    Google Scholar 

  9. J.M. Kahn, R.H. Katz, and K.S.J. Pister, ACM/IEEE Intl. Conf. on Mobile Computing and Networking(Seattle, WA, Aug. 17-19, 1999).

  10. S.J. Walker and D.J. Nagel, Optics and MEMS, NRL report NRL/MR/6336-99-7975, May 15, 1999, http://code-6330.nrl.navy.mil/6336/moems.htm

  11. M.A. Chan, S.D. Collins, and R.L. Smith, Sensor and Actuators, A43, 196 (1994).

    Google Scholar 

  12. E.C. Vail, G.S. Li, W. Yuen, et al., Electronic Letters, 32, 1888 (1996).

    Google Scholar 

  13. D.T. Neilson, et al., Technical Digest of Optical Fiber Communication Conference 2000, PD-12, March 2000.

  14. R. Corrigan, R. Cook, and O. Favotte, white paper, Silicon Light Machines company website, http://www.siliconlight.com/htmlpgs/glvtechframes/glvmainframeset.html

  15. C. Wong, W. Shih, Y. Jeon, S. Desai, S. Kim, and G. Barbastathis, Proc. of Solid-State Sensor and Actuator Workshop(Hilton Head, South Carolina, June, 2002).

  16. W. Lukosz, Integrated Optics and Microstructures(Boston, MA, 1993).

  17. W. Lukosz, Sensors and Actuators B, 29, 37 (1995).

    Google Scholar 

  18. Y.K. Kim, J.M. Bae, S.Y. Son, J.H. Choi, and S.G. Kim, Proc. of MOEMS '99(Mainz, Germany, Sept. 1999).

  19. Chee-wei Wong,Yongbae Jeon, G. Barbastathis, and Sang-Gook Kim, Applied Optics, 42(4), (2003).

  20. E.S. Hung and S.D. Senturia, J. of Microelectromechanical Systems, 8(4), (1999).

  21. R.A. Wood, C.J. Han, and P.W. Kruse, Proc. IEEE Solid-State Sensor and Actuator Workshop, (1992).

  22. H.K. Lee, J.B. Yoon, E. Yoon, S.B. Ju, Y.J. Yong, W. Lee, and S.G. Kim, IEEE Trans. on Electron Devices, 46(7), (1999).

  23. R. Dangel and W. Lukosz, Opt. Commun., 156, 63 (1998).

    Google Scholar 

  24. M.S. Wu, E.C. Vail, G.S. Li, W. Yuen, and C.J. Chang-Hasnain, Electron. Lett., 31(19), 1671 (1995).

    Google Scholar 

  25. S. Kinoshita, K. Morito, F. Koyama, and K. Iga, Electron. Lett., 24(11), 699 (1988).

    Google Scholar 

  26. J.L. Jewell, A. Scherer, S.L. McCall, Y.-H. Lee, S. Walker, J.P. Harbison, and L.T. Florez, Electron. Lett., 25(17), 1123 (1989).

    Google Scholar 

  27. C.J. Chang-Hasnain, Proc. SPIE, 4580, 40 (2001).

    Google Scholar 

  28. W.-C. Shih, C. Hidrovo, S.-G. Kim, and G. Barbastathis, IEEE Nanotechnology Conference(San Francisco, CA, Aug. 2003).

  29. M. Bertero and P. Boccacci, Introduction to Inverse Problems in Imaging(Institute of Physics Publishing, 1998).

  30. L.J. Hornbeck, MRS Bulletin, 26, 325 (2001).

    Google Scholar 

  31. H. Hogan, Photonics Spectra, 36(10), 68 (2002).

    Google Scholar 

  32. R.T. Chen, H. Nguyen, and M.C. Wu, IEEE Photonics Tech. Lett., 11(11), 1396 (1999).

    Google Scholar 

  33. M. Tabib-Azar, Integrated Optics, Microstructures and Sensors(Kluwer Academic Publ., Boston, MA, 1995), p. 171.

    Google Scholar 

  34. B.W. Wessels, J. Crystal Growth, 195, 706 (1998).

    Google Scholar 

  35. R.L. Holman, L.M. Althouse Johnson, and D.P. Skinner, Proc. 6th IEEE Int. Symp Appl. Ferroelectrics(Lehigh Univ., Bethlehem, PA, 1986), p. 32.

    Google Scholar 

  36. P. Muralt, J. Micromech. Microeng. 10, 136 (2000).

    Google Scholar 

  37. G. Chik, InternationalWorkshop on Future Trends in Microelectronics: The Nano Millennium(Ile de Bendor, France, 2001).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Mechanical Engineering, Microsystems Technology Laboratories, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA

    S. Kim & G. Barbastathis

  2. Department of Materials Science and Engineering, Microsystems Technology Laboratories, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA

    H.L. Tuller

Authors
  1. S. Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. G. Barbastathis
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. H.L. Tuller
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Kim, S., Barbastathis, G. & Tuller, H. MEMS for Optical Functionality. Journal of Electroceramics 12, 133–144 (2004). https://doi.org/10.1023/B:JECR.0000034007.73050.0b

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/B:JECR.0000034007.73050.0b

Search

Navigation