Skip to main content
SpringerLink
Log in

Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films

  • Published:
Journal of Electroceramics Aims and scope Submit manuscript

Abstract

A review is given on the current state of the art in piezoelectric micromachined ultrasonic transducers (pMUT). It is attempted to quantify the limits of pMUT's with respect to the electromechanical coupling, and to relate current achievements. Main needs for future research are identified in design, micromachining and further improvements of PZT films. Applications are shortly reviewed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. J.C. Bamber and M. Tristam, The Physics of Medical Imaging, edited by S. Webb (Adam Hilger: Bristol, 1988), p. 319.

    Google Scholar 

  2. J.L. Vernet, W. Steichen, R. Lardat, O. Garcia, and J.F. Gelly, IEEEE Ultrasonic Symposium(IEEE, Atlanta USA, 2001).

    Google Scholar 

  3. V. Mecea, Sensors and Actuators B, 15/16, 265 (1993).

    Google Scholar 

  4. P. Muralt, M. Kohli, T. Maeder, A. Kholkin, K.G. Brooks, N. Setter, et al., Sensors and Actuators A, 48, 157 (1995).

    Google Scholar 

  5. G. Percin, T.S. Lundgren, and B.T. Khuri-Yakub, Appl. Phys. Lett., 73, 2375 (1998).

    Google Scholar 

  6. M.I. Haller and B.T. Khuri-Jakub. IEEE Ultrasonic Symposium(1994).

  7. M.I. Haller and B.T. Khuri-Jakub, IEEE Trans. UFFC, 43, 1 (1996).

    Google Scholar 

  8. H.T. Soh, I. Ladabaum, A. Atalar, C.F. Quate, and B.T. Khuri-Jakub, Appl. Phys. Lett., 69, 3674 (1996).

    Google Scholar 

  9. J.J. Bernstein, S.L. Finberg, K. Houston, L.C. Niles, H.D. Chen, L.E. Cross, et al., IEEE Trans. UFFC, 44, 960 (1997).

    Google Scholar 

  10. O. Oralkan, X. Jin, L. Degertekin, and P. Khuri-Yakub, IEEE Trans. UFFC, 46(1999).

  11. P.C. Eccardt and K. Niederer, Ultrasonics, 38, 774 (2000).

    PubMed  Google Scholar 

  12. R. Farlow, W. Galbraith, M. Knowless, and G. Heyward, IEEE Trans. UFFC, 48, 639 (2001).

    Google Scholar 

  13. S.J. Ok, C.H. Kim, and D.F. Baldwin, IEEE Trans. Adv. Packaging, 26, 302 (2003).

    Google Scholar 

  14. X.G. Li, T. Abe, X.Y. Liu, and M. Esashi, J. Microelectromech. Systems, 11, 625 (2002).

    Google Scholar 

  15. C.M. Hanson, Semiconductors and Semimetals, 47, 123 (1997).

    Google Scholar 

  16. A.S. Ergun, G.G. Yaralioglu, and B.T. Khuri-Yakub, J. Aerospace Eng., April 2003, 76 (2003).

    Google Scholar 

  17. J. Johnson, O. Oralkan, U. Demirci, S. Ergun, M. Karaman, and P. Khuri-Yakub, Ultrasonics, 40, 471 (2002).

    PubMed  Google Scholar 

  18. G.G. Yaralioglu, A.S. Ergun, B. Bayram, E. Haeggstrom, and B.T. Khuri-Jakub, IEEE Trans. UFFC, 50, 449 (2003).

    Google Scholar 

  19. F.V. Hunt, Electroacoustics: The Analysis of Transduction and its Historical Background, 2nd edition Harvard University Press: Cambridge MA, 1982.

    Google Scholar 

  20. P. Muralt, Integrated Ferroelectrics, 17, 297 (1997).

    Google Scholar 

  21. M.-A. Dubois and P. Muralt, Sensors and Actuators A, 77, 106 (1999).

    Google Scholar 

  22. J.F. Shepard, P.J. Moses, and S. Trolier-McKinstry, Sensors and Actuators A, 71, 133 (1998).

    Google Scholar 

  23. N. Ledermann, P. Muralt, J. Baborowski, S. Gentil, K. Mukati, M. Cantoni, et al., Sensors and Actuators A, 105, 162 (2003).

    Google Scholar 

  24. A.M. Flynn, L.S. Tavrow, S.F. Bart, R.A. Brooks, D.J. Ehrlich, K.R. Udajakumar, et al., Piezoelectric micromotors for microrobots, J. Microelectromechanical Systems, 1, 44 (1992).

    Google Scholar 

  25. G. Percin and B.T. Khuri-Yakub, IEEE Trans. UFFC, 49, 573 (2002).

    Google Scholar 

  26. G. Percin, IEEE Trans. UFFC, 50, 81 (2003).

    Google Scholar 

  27. P. Muralt, A. Kholkin, M. Kohli, and T. Maeder, Sensors and Actuators A, 53, 397 (1996).

    Google Scholar 

  28. M.-A. Dubois and P. Muralt, IEEE Transactions on Ultrasonics, Ferroelectrics and Fequency Control, 45, 1169 (1998).

    Google Scholar 

  29. I. Szabo, Höhere Technische Mechanilk. Springer: Berlin, Göttingen, Heidelberg, 1956.

    Google Scholar 

  30. J. Söderquist, J. Micromech. Microeng., 3, 24 (1993).

    Google Scholar 

  31. J. Baborowski, J. Electroceramics(2003).

  32. P. Muralt, D. Schmitt, N. Ledermann, J. Baborowski, P.K. Weber, W. Steichen, et al. IEEE Ultrasonic Symposium(Atlanta, USA, 2001).

  33. J. Baborowski, N. Ledermann, and P. Muralt. IEEE Ultrasonic Symposium(Munich, Germany, 2002).

  34. P. Muralt, D. Schmitt, N. Ledermann, J. Baborowski, P.K.Weber, W. Steichen, et al. IEEE Ultrasonics conference 2001, IEEE (Atlanta, USA, 2001).

  35. D. Royer and E. Dieulesaint, Ondes elastiques dans les solides. Vol. 1, Masson, Paris 1996.

  36. S. Troyler-McKinstrey and P. Muralt, see this issue, (2003).

  37. J. Baborowski, N. Ledermann, P. Muralt, and D. Schmitt, Int. J. Comp. Eng. Sci., 4, 471 (2003).

    Google Scholar 

  38. J.F. Gelly, F. Lanteri, and S. Ballandras, 3rd MUT Workshop, Lausanne (2003).

  39. K. Yamshita, H. Katata, M. Okuyama, H. Miyoshi, G. Kato, S. Aoyagi, et al., Sensors and Actuators A, 97/98, 302 (2002).

    Google Scholar 

  40. G. Percin and B.T. Khuri-Yakub, Review of Scientific Instruments, 73, 2193 (2002).

    Google Scholar 

  41. N. Ledermann, J. Baborowski, A. Seifert, B. Willing, S. Hiboux, P. Muralt, et al., Integrated Ferroelectrics, 35, 177 (2001).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Ceramics Laboratory, Swiss Federal Institute of Technology EPFL, CH-1015, Lausanne, Switzerland

    P. Muralt & J. Baborowski

Authors
  1. P. Muralt
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. J. Baborowski
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Muralt, P., Baborowski, J. Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films. Journal of Electroceramics 12, 101–108 (2004). https://doi.org/10.1023/B:JECR.0000034004.99355.8b

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/B:JECR.0000034004.99355.8b

Search

Navigation