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Large Area Organic Thin Film Coating Using a Micro Multi-nozzle Jet Head with Side Suction Channels

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Abstract

In this paper, we propose a unique micro multi-nozzle jet head to generate a stable column jet flow by applying vacuum suction to the side of a jetting nozzle. The micro multi-nozzle jet head was designed and fabricated to operate in both the jetting and suction modes selectively or simultaneously. The jet head includes eighteen jetting nozzles of 100 μm diameter, vacuum suction channels, inlets and a nozzle protection outer hole. The whole size of the micro multi-nozzle jet plate is 50 × 20 mm2. To demonstrate large area organic thin film coating, micro multi-nozzle jet coating was performed on a 5th generation size (1100 × 1300 mm2) glass substrate. A poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) solution was selected as a test ink. To uniformly coat an organic thin film, we first investigated the physical parameter conditions such as jetting pressure, head suction pressure, stage moving speed, and coating head printing pitch. The thickness of the coated PEDOT:PSS thin film was 76.86 ± 3.33 nm and its uniformity (CV) was 4.33%.

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Funding

This study has been conducted with the support of the Korea Institute of Industrial Technology as “Development of Core Technologies for a Working Partner Robot in the Manufacturing Field (KITEH EO-20-0018).

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Authors and Affiliations

  1. Korea Institute of Industrial Technology, 143 Hanggaul-ro, Sangnok-gu, Ansan-si, Gyeonggi-do, 15588, Republic of Korea

    Kwon-Yong Shin, Kyung-Tae Kang & Sang-Ho Lee

  2. Program in Nanoscience and Technology, Graduate School of Convergence Science and Technology, Seoul National University, Seoul, 08826, Republic of Korea

    Mingyu Kang

  3. DEVICEENG Co., LTD., 169, Eumbong-myeon, Asan-si, Chungcheongnam-do, 336-864, Republic of Korea

    Myong-Ki Kim

  4. Department of Mechanical Engineering, Ulsan National Institute of Science and Technology (UNIST), UNIST-Gil 50, Ulsan, 44919, Republic of Korea

    Ki Sung Jung & Chun Sang Yoo

Authors
  1. Kwon-Yong Shin
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  2. Mingyu Kang
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Correspondence to Sang-Ho Lee.

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Shin, KY., Kang, M., Kim, MK. et al. Large Area Organic Thin Film Coating Using a Micro Multi-nozzle Jet Head with Side Suction Channels. Int. J. of Precis. Eng. and Manuf.-Green Tech. 8, 829–840 (2021). https://doi.org/10.1007/s40684-021-00334-7

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  • DOI: https://doi.org/10.1007/s40684-021-00334-7

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