Abstract
Ternary III–V nanowires (NWs) cover a wide range of wavelengths in the solar spectrum and would greatly benefit from being synthesized as position-controlled arrays for improved vertical yield, reproducibility, and tunable optical absorption. Here, we report on successful selective-area epitaxy of metal-particle-free vertical In x Ga1−x P NW arrays using metal–organic vapor phase epitaxy and detail their optical properties. A systematic growth study establishes the range of suitable growth parameters to obtain uniform NW growth over a large array. The optical properties of the NWs were characterized by room-temperature cathodoluminescence spectroscopy. Tunability of the emission wavelength from 870 nm to approximately 800 nm was achieved. Transmission electron microscopy and energy dispersive X-ray measurements performed on cross-section samples revealed a pure wurtzite crystal structure with very few stacking faults and a slight composition gradient along the NW growth axis.
Similar content being viewed by others
References
Yan, R. X.; Gargas, D.; Yang, P. D. Nanowire photonics. Nat. Photon. 2009, 3, 569–576.
Tomioka, K.; Motohisa, J.; Hara, S.; Fukui, T. Control of InAs nanowire growth directions on Si. Nano Lett. 2008, 8, 3475–3480.
Tomioka, K.; Yoshimura, M.; Fukui, T. A III-V nanowire channel on silicon for high-performance vertical transistors. Nature 2012, 488, 189–192.
Borg, M.; Schmid, H.; Moselund, K. E.; Signorello, G.; Gignac, L.; Bruley, J.; Breslin, C.; Das Kanungo, P.; Werner, P.; Riel, H. Vertical III-V nanowire device integration on Si(100). Nano Lett. 2014, 14, 1914–1920.
Cohin, Y.; Mauguin, O.; Largeau, L.; Patriarche, G.; Glas, F.; Søndergård, E.; Harmand, J. C. Growth of vertical GaAs nanowires on an amorphous substrate via a fiber-textured Si platform. Nano Lett. 2013, 13, 2743–2747.
Garnett, E.; Yang, P. D. Light trapping in silicon nanowire solar cells. Nano Lett. 2010, 10, 1082–1087.
Anttu, N. Shockley-queisser detailed balance efficiency limit for nanowire solar cells. ACS Photon. 2015, 2, 446–453.
Wallentin, J.; Poncela, L. B.; Jansson, A. M.; Mergenthaler, K.; Ek, M.; Jacobsson, D.; Wallenberg, L. R.; Deppert, K.; Samuelson, L.; Hessman, D. et al. Single GaInP nanowire p-i-n junctions near the direct to indirect bandgap crossover point. Appl. Phys. Lett. 2012, 100, 251103.
Standing, A.; Assali, S.; Gao, L.; Verheijen, M. A.; van Dam, D.; Cui, Y. C.; Notten, P. H. L.; Haverkort, J. E. M.; Bakkers, E. P. A. M. Efficient water reduction with gallium phosphide nanowires. Nat. Commun. 2015, 6, 7824.
Wagner, R. S.; Ellis, W. C. Vapor-liquid-solid mechanism of single crystal growth. Appl. Phys. Lett. 1964, 4, 89–90.
Zhuang, X. J.; Ning, C. Z.; Pan, A. L. Composition and bandgap-graded semiconductor alloy nanowires. Adv. Mater. 2012, 24, 13–33.
Jacobsson, D.; Panciera, F.; Tersoff, J.; Reuter, M. C.; Lehmann, S.; Hofmann, S.; Dick, K. A.; Ross, F. M. Interface dynamics and crystal phase switching in GaAs nanowires. Nature 2016, 531, 317–322.
Ameruddin, A. S.; Fonseka, H. A.; Caroff, P.; Wong-Leung, J.; Veld, R. L. M. O. H.; Boland, J. L.; Johnston, M. B.; Tan, H. H.; Jagadish, C. InxGa1–xAs nanowires with uniform composition, pure wurtzite crystal phase and taper-free morphology. Nanotechnology 2015, 26, 205604.
Priante, G.; Patriarche, G.; Oehler, F.; Glas, F.; Harmand, J.-C. Abrupt GaP/GaAs interfaces in self-catalyzed nanowires. Nano Lett. 2015, 15, 6036–6041.
Tomioka, K.; Ikejiri, K.; Tanaka, T.; Motohisa, J.; Hara, S.; Hiruma, K.; Fukui, T. Selective-area growth of III-V nanowires and their applications. J. Mater. Res. 2011, 26, 2127–2141.
Gao, Q.; Saxena, D.; Wang, F.; Fu, L.; Mokkapati, S.; Guo, Y. A.; Li, L.; Wong-Leung, J.; Caroff, P.; Tan, H. H. et al. Selective-area epitaxy of pure wurtzite InP nanowires: High quantum efficiency and room-temperature lasing. Nano Lett. 2014, 14, 5206–5211.
Ishizaka, F.; Hiraya, Y.; Tomioka, K.; Fukui, T. Growth of wurtzite GaP in InP/GaP core–shell nanowires by selectivearea MOVPE. J. Cryst. Growth 2015, 411, 71–75.
Kim, H.; Farrell, A. C.; Senanayake, P.; Lee, W.-J.; Huffaker, D. L. Monolithically integrated InGaAs nanowires on 3D structured silicon-on-insulator as a new platform for full optical links. Nano Lett. 2016, 16, 1833–1839.
Treu, J.; Speckbacher, M.; Saller, K.; Morkö tter, S.; Dö blinger, M.; Xu, X.; Riedl, H.; Abstreiter, G.; Finley, J. J.; Koblmü ller, G. Widely tunable alloy composition and crystal structure in catalyst-free InGaAs nanowire arrays grown by selective area molecular beam epitaxy. Appl. Phys. Lett. 2016, 108, 053110.
Sourribes, M. J. L.; Isakov, I.; Panfilova, M.; Liu, H. Y.; Warburton, P. A. Mobility enhancement by Sb-mediated minimisation of stacking fault density in InAs nanowires grown on silicon. Nano Lett. 2014, 14, 1643–1650.
Farrell, A. C.; Lee, W. J.; Senanayake, P.; Haddad, M. A.; Prikhodko, S. V.; Huffaker, D. L. High-quality InAsSb nanowires grown by catalyst-free selective-area metal-organic chemical vapor deposition. Nano Lett. 2015, 15, 6614–6619.
Ishizaka, F.; Ikejiri, K.; Tomioka, K.; Fukui, T. Indium-rich InGaP nanowires formed on InP (111)A substrates by selective-area metal organic vapor phase epitaxy. Jpn. J. Appl. Phys. 2013, 52, 04CH05.
Mohan, P.; Motohisa, J.; Fukui, T. Controlled growth of highly uniform, axial/radial direction-defined, individually addressable InP nanowire arrays. Nanotechnology 2005, 16, 2903–2907.
Ikejiri, K.; Ishizaka, F.; Tomioka, K.; Fukui, T. Bidirectional growth of indium phosphide nanowires. Nano Lett. 2012, 12, 4770–4774.
Berg, A.; Lenrick, F.; Vainorius, N.; Beech, J. P.; Wallenberg, L. R.; Borgströ m, M. T. Growth parameter design for homogeneous material composition in ternary Ga x In1–x P nanowires. Nanotechnology 2015, 26, 435601.
Fontcuberta i Morral, A.; Colombo, C.; Abstreiter, G.; Arbiol, J.; Morante, J. R. Nucleation mechanism of galliumassisted molecular beam epitaxy growth of gallium arsenide nanowires. Appl. Phys. Lett. 2008, 92, 063112.
Gao, Q.; Dubrovskii, V. G.; Caroff, P.; Wong-Leung, J.; Li, L.; Guo, Y.; Fu, L.; Tan, H. H.; Jagadish, C. Simultaneous selective-area and vapor-liquid-solid growth of InP nanowire arrays. Nano Lett. 2016, 16, 4361–4367.
Uccelli, E.; Arbiol, J.; Magen, C.; Krogstrup, P.; Russo-Averchi, E.; Heiss, M.; Mugny, G.; Morier-Genoud, F.; Nygå rd, J.; Morante, J. R. et al. Three-dimensional multipleorder twinning of self-catalyzed GaAs nanowires on Si substrates. Nano Lett. 2011, 11, 3827–3832.
Kavanagh, K. L.; Salfi, J.; Savelyev, I.; Blumin, M.; Ruda, H. E. Transport and strain relaxation in wurtzite InAs–GaAs core-shell heterowires. Appl. Phys. Lett. 2011, 98, 152103.
Shin, J. C.; Choi, K. J.; Kim, D. Y.; Choi, W. J.; Li, X. L. Characteristics of strain-induced In x Ga1–x As nanowires grown on Si(111) substrates. Cryst. Growth Des. 2012, 12, 2994–2998.
Day, R. W.; Mankin, M. N.; Lieber, C. M. Plateau-rayleigh crystal growth of nanowire heterostructures: Strain-modified surface chemistry and morphological control in one, two, and three dimensions. Nano Lett. 2016, 16, 2830–2836.
Zhu, H. X. The effects of surface and initial stresses on the bending stiffness of nanowires. Nanotechnology 2008, 19, 405703.
Keplinger, M.; Kriegner, D.; Stangl, J.; Mårtensson, T.; Mandl, B.; Wintersberger, E.; Bauer, G. Core-shell nanowires: From the ensemble to single-wire characterization. Nucl. Instrum. Meth. B 2010, 268, 316–319.
Li, X. F.; Wang, B. L.; Lee, K. Y. Size effects of the bending stiffness of nanowires. J. Appl. Phys. 2009, 105, 074306.
Yoshimura, M.; Tomioka, K.; Hiruma, K.; Hara, S.; Motohisa, J.; Fukui, T. Growth and characterization of InGaAs nanowires formed on GaAs(111)B by selective-area metal organic vapor phase epitaxy. Jpn. J. Appl. Phys. 2010, 49, 04DH08.
Kohashi, Y.; Sato, T.; Ikejiri, K.; Tomioka, K.; Hara, S.; Motohisa, J. Influence of growth temperature on growth of InGaAs nanowires in selective-area metal-organic vapor-phase epitaxy. J. Cryst. Growth 2012, 338, 47–51.
Gomyo, A.; Kobayashi, K.; Kawata, S.; Hino, I.; Suzuki, T.; Yuasa, T. Studies of Ga x In1-x P layers grown by metalorganic vapor phase epitaxy; Effects of V/III ratio and growth temperature. J. Cryst. Growth 1986, 77, 367–373.
Ohba, Y.; Ishikawa, M.; Sugawara, H.; Yamamoto, M.; Nakanisi, T. Growth of high-quality InGaAIP epilayers by MOCVD using methyl metalorganics and their application to visible semiconductors lasers. J. Cryst. Growth 1986, 77, 374–379.
Nozaki, C.; Ohba, Y.; Sugawara, H.; Yasuami, S.; Nakanisi, T. Growth temperature dependent atomic arrangements and their role on band-gap of InGaAlP alloys grown by MOCVD. J. Cryst. Growth 1988, 93, 406–411.
Suzuki, T.; Gomyo, A.; Iijima, S.; Kobayashi, K.; Kawata, S.; Hino, I.; Yuasa, T. Band-gap energy anomaly and sublattice ordering in GaInP and AlGaInP grown by metalorganic vapor phase epitaxy. Jpn. J. Appl. Phys. 1988, 27, 2098–2106.
Hageman, P. R.; Bauhuis, G. J.; Olsthoorn, S. M. Influence of Ga precursor choice on ordering degree of MOVPE grown Ga0.5In0.5P. J. Cryst. Growth 1998, 194, 272–275.
Kurtz, S. R.; Olson, J. M.; Kibbler, A. Effect of growth rate on the band gap of Ga0.5In0.5P. Appl. Phys. Lett. 1990, 57, 1922–1924.
Stringfellow, G. B. Organometallic Vapor-Phase Epitaxy: Theory and Practice; 2nd ed.; Academic Press: San Diego, 1999.
Neuhalfen, A. J.; Wessels, B. W. Electronic and photoluminescent properties of InP prepared by flow modulation epitaxy. J. Appl. Phys. 1992, 71, 281–288.
Tomioka, K.; Mohan, P.; Noborisaka, J.; Hara, S.; Motohisa, J.; Fukui, T. Growth of highly uniform InAs nanowire arrays by selective-area MOVPE. J. Cryst. Growth 2007, 298, 644–647.
Ida, M.; Shigekawa, N.; Furuta, T.; Ito, H.; Kobayashi, T. Compositional change near the mask edge in selective InGaAs growth by low-temperature MOCVD. J. Cryst. Growth 1996, 158, 437–442.
Kim, Y.; Joyce, H. J.; Gao, Q.; Tan, H. H.; Jagadish, C.; Paladugu, M.; Zou, J.; Suvorova, A. A. Influence of nanowire density on the shape and optical properties of ternary InGaAs nanowires. Nano Lett. 2006, 6, 599–604.
Zimmermann, G.; Ougazzaden, A.; Gloukhian, A.; Rao, E. V. K.; Delprat, D.; Ramdane, A.; Mircea, A. Selective area MOVPE growth of InP, InGaAs and InGaAsP using TBAs and TBP at different growth conditions. J. Cryst. Growth 1997, 170, 645–649.
Shapiro, J. N.; Scofield, A. C.; Lin, A.; Benzoni, N.; Mariani, G.; Huffaker, D. L. The dependence of alloy composition of InGaAs inserts in GaAs nanopillars on selective-area pattern geometry. arXiv: 1305.3581, 2013.
Persson, A. I.; Fröberg, L. E.; Samuelson, L.; Linke, H. The fabrication of dense and uniform InAs nanowire arrays. Nanotechnology 2009, 20, 225304.
Hertenberger, S.; Rudolph, D.; Bichler, M.; Finley, J. J.; Abstreiter, G.; Koblmüller, G. Growth kinetics in positioncontrolled and catalyst-free InAs nanowire arrays on Si(111) grown by selective area molecular beam epitaxy. J. Appl. Phys. 2010, 108, 114316.
Rudolph, D.; Schweickert, L.; Morkötter, S.; Loitsch, B.; Hertenberger, S.; Becker, J.; Bichler, M.; Abstreiter, G.; Finley, J. J.; Köblmuller, G. Effect of interwire separation on growth kinetics and properties of site-selective GaAs nanowires. Appl. Phys. Lett. 2014, 105, 033111.
Aghdam, F. F.; Liao, H. T.; Huang, Q. Modeling interaction in nanowire growth process toward improved yield. IEEE Trans. Autom. Sci. Eng., in press, DOI: 10.1109/TASE.2015.2499210.
Korgel, B.; Hicks, R. F. A diffusion model for selectivearea epitaxy by metalorganic chemical vapor deposition. J. Cryst. Growth 1995, 151, 204–212.
Chen, X. L.; Lan, Y. C.; Li, J. Y.; Cao, Y. G.; He, M. Radial growth dynamics of nanowires. J. Cryst. Growth 2001, 222, 586–590.
Gibson, S.; LaPierre, R. Study of radial growth in patterned self-catalyzed GaAs nanowire arrays by gas source molecular beam epitaxy. Phys. Status Solidi 2013, 7, 845–849.
Maharjan, A.; Pemasiri, K.; Kumar, P.; Wade, A.; Smith, L. M.; Jackson, H. E.; Yarrison-Rice, J. M.; Kogan, A.; Paiman, S.; Gao, Q. et al. Room temperature photocurrent spectroscopy of single zincblende and wurtzite InP nanowires. Appl. Phys. Lett. 2009, 94, 193115.
Vurgaftman, I.; Meyer, J. R.; Ram-Mohan, L. R. Band parameters for III-V compound semiconductors and their alloys. J. Appl. Phys. 2001, 89, 5815–5875.
Varshni, Y. P. Temperature dependence of the energy gap in semiconductors. Physica 1967, 34, 149–154.
Borgström, M. T.; Immink, G.; Ketelaars, B.; Algra, R.; Bakkers, E. P. A. M. Synergetic nanowire growth. Nat. Nanotechnol. 2007, 2, 541–544.
Verheijen, M. A.; Immink, G.; de Smet, T.; Borgström, M. T.; Bakkers, E. P. A. M. Growth kinetics of heterostructured GaP-GaAs nanowires. J. Amer. Chem. Soc. 2006, 128, 1353–1359.
Acknowledgements
We thank Q. Gao for helping transfer the NWs from the arrays to Si substrates using a micro-manipulator. Dr. L. Li is acknowledged for preparing the cross-section samples. Drs. S. Naureen and F. Karouta are acknowledged for discussions on sample pre-processing steps. The Australian Research Council is acknowledged for financial support. This work has been made possible through the access to the ACT Node of the Australian National Fabrication Facility and Australian Microscopy and Microanalysis Research Facility. A. Berg gratefully acknowledges scholarships from NanoLund (the Center for Nanoscience at Lund University, Sweden) and the Linnaeus Graduate School at Lund University, as well as funding from the project “Energieffektiv LED-belysning baserad på nanotrådar” financed by the Swedish Foundation for Strategic Research (SSF, project number EM11-0015).
Author information
Authors and Affiliations
Corresponding authors
Electronic supplementary material
Rights and permissions
About this article
Cite this article
Berg, A., Caroff, P., Shahid, N. et al. Growth and optical properties of In x Ga1−x P nanowires synthesized by selective-area epitaxy. Nano Res. 10, 672–682 (2017). https://doi.org/10.1007/s12274-016-1325-1
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s12274-016-1325-1