Abstract
Peculiarities in determining the dopant concentration and dopant distribution profile in the near-surface layer of a semiconductor are investigated by measuring the admittance of metal–insulator–semiconductor structures (MIS structures) based on p-Hg0.78Cd0.22Te grown by molecular beam epitaxy. The dopant concentrations in the near-surface layer of the semiconductor are determined by measuring the admittance of MIS structures in the frequency range of 50 kHz to 1 MHz. It is shown that in this frequency range, the capacitance–voltage characteristics of MIS structures based on p-Hg0.78Cd0.22Te with a near-surface graded gap layer demonstrate a high-frequency behavior with respect to the recharge time of surface states located near the Fermi level for an intrinsic semiconductor. The formation time of the inversion layer is decreased by less than two times, if a near-surface graded-gap layer is created. The dopant distribution profile in the near-surface layer of the semiconductor is found, and it is shown that for structures based on p-Hg0.78Cd0.22Te with a near-surface graded-gap layer, the dopant concentration has a minimum near the interface with the insulator. For MIS structure based on n-Hg0.78Cd0.22Te, the dopant concentration is more uniformly distributed in the near-surface layer of the semiconductor.
Similar content being viewed by others
References
A. Rogalski, Infrared Detectors, 2nd ed. (New York: CRC Press, 2011).
C. Fulk, W. Radford, D. Buell, J. Bangs, and K. Rybnicek, J. Electron. Mater. 44, 2977 (2015).
R. Singh, A.K. Gupta, and K.C. Chhabra, Def. Sci. J. 41, 205 (2013).
G.H. Tsau, A. Sher, M. Madou, J.A. Wilson, V.A. Cotton, and C.E. Jones, J. Appl. Phys. 59, 1238 (1986).
Y. Nemirovsky and I. Bloom, J. Vac. Sci. Technol. A6, 2710 (1988).
A.V. Voitsekhovskii, S.N. Nesmelov, and S.M. Dzyadukh, Russ. Phys. J. 52, 1003 (2009).
S. Dvoretsky, N. Mikhailov, Y. Sidorov, V. Shvets, S. Danilov, B. Wittman, and S. Ganichev, J. Electron. Mater. 39, 918 (2010).
A.V. Voitsekhovskii, S.N. Nesmelov, and S.M. Dzyadukh, Thin Solid Films 522C, 261 (2012).
A.V. Voitsekhovskii, S.N. Nesmelov, and S.M. Dzyadukh, Thin Solid Films 551, 92 (2014).
A.V. Voitsekhovskii, S.N. Nesmelov, S.M. Dzyadukh, V.V. Vasil’ev, V.S. Varavin, S.A. Dvoretsky, N.N. Mikhailov, and M.V. Yakushev, Infrared Phys. Technol. 71, 236 (2015).
A.V. Voitsekhovskii, S.N. Nesmelov, S.M. Dzyadukh, V.V. Vasil’ev, V.S. Varavin, S.A. Dvoretsky, N.N. Mikhailov, V.D. Kuz’min, and V.G. Remesnik, Russ. Phys. J. 57, 707 (2014).
A.V. Voitsekhovskii, S.N. Nesmelov, and S.M. Dzyadukh, Russ. Phys. J. 57, 1070 (2014).
E.H. Nicollian and J.R. Brews, MOS Physics and Technology (New York: Wiley, 1982).
W. Van Gelder and E.H. Nicollian, J. Electrochem. Soc. 118, 138 (1971).
J.R. Brews, J. Appl. Phys. 44, 3228 (1973).
S.M. Sze, Physics of Semiconductor Devices, 3rd ed. (NewYork: Wiley, 2007).
K.D. Mynbaev and V.I. Ivanov-Omskii, Semiconductors 40, 1 (2006).
I.I. Izhnin, S.A. Dvoretsky, K.D. Mynbaev, O.I. Fitsych, N.N. Mikhailov, V.S. Varavin, M. Pociask-Bialy, A.V. Voitsekhovskii, and E. Sheregii, J. Appl. Phys. 115, 163501 (2014).
M. Reddy, W.A. Radford, D.D. Lofgreen, K.R. Olsson, J.M. Peterson, and S.M. Johnson, J. Electron. Mater. 43, 2991 (2014).
C. Lobre, P.H. Jouneau, L. Mollard, and P. Ballet, J. Electron. Mater. 43, 2908 (2014).
T. Aoki, Y. Chang, G. Badano, J. Zhao, C. Grein, S. Sivananthan, and D.J. Smith, J. Cryst. Growth 265, 224 (2004).
P. Capper, C.D. Maxey, C.L. Jones, J.E. Gower, E.S. O’Keefe, and D. Shaw, J. Electron. Mater. 28, 637 (1999).
M.V. Yakushev, D.V. Brunev, V.S. Varavin, A.V. Vishnyakov, S.A. Dvoretskij, A.V. Predein, and I.V. Sabinina, Infrared Phys. Technol. 69, 107 (2015).
V.V. Vasilyev, A.V. Voitsekhovsky, F.N. Dultsev, T.A. Zemtsova, I.O. Parm, and A.P. Solovyev, Appl. Phys. 5, 63 (2007).
R.S. Nakhmanson, Solid-State Electron. 19, 745 (1976).
M.M. Bülbül, Microelectron. Eng. 84, 124 (2007).
A. Berman and D.R. Kerr, Solid-State Electron. 17, 735 (1974).
M.A. Kinch, Metal–insulator–semiconductor infrared detectors.Semiconductors and Semimetals, Vol. 18, ed. R.K. Willardson and A.C. Beer (New York: Academic Press, 1981), p. 313.
A.R. LeBlanc, D.D. Kleppinger, and J.P. Walsh, J. Electrochem. Soc. 119, 1068 (1972).
S.T. Lin and J. Reuter, Solid-State Electron. 26, 343 (1983).
A.V. Voitsekhovskii, D.V. Grigor’ev, and N.K. Talipov, Russ. Phys. J. 51, 1001 (2008).
A.V. Voitsekhovskii and A.P. Kokhanenko, Russ. Phys. J. 41, 76 (1998).
Acknowledgement
This work was supported in part by the Grant (No. 8.2.10.2015) within the “The Tomsk State University Academic D.I. Mendeleev Fund Program”. This work was financially supported by the State Task No. 16.1032.2014/K. The authors are grateful to the staff of ISP SB RAS Varavin V.S., Vasil’ev V.V., Dvoretsky S.A., Mikhailov N.N., Yakushev M.V., Sidorov G.Y., and Parm I.O. for providing the MBE HgCdTe samples.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Voitsekhovskii, A.V., Nesmelov, S.N. & Dzyadukh, S.M. Dopant in Near-Surface Semiconductor Layers of Metal–Insulator–Semiconductor Structures Based on Graded-Gap p-Hg0.78Cd0.22Te Grown by Molecular-Beam Epitaxy. J. Electron. Mater. 45, 881–891 (2016). https://doi.org/10.1007/s11664-015-4239-x
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11664-015-4239-x