Abstract
In this paper, we describe the properties of flexible plastic substrates with a transparent conducting electrode (TCE), which are important for organic light-emitting devices (OLEDs). Specifically, we have evaluated the TCE electrical resistivity, surface roughness, electrode patterning, optical transmission, and the substrate water vapor/oxygen transmission. We have studied the effect of ultraviolet (UV)-ozone treatment on the TCE surface by using contact angle measurements and x-ray photoelectron spectroscopy (XPS). A decrease in the advancing contact angle by 30–40° and an increase of oxygen content on the TCE surface by 10 at.% were observed after the UV-ozone treatment. These changes facilitate the polymer adhesion to the TCE surface and increase the TCE surface work function, respectively. A sheet resistance of 12–13 Ω/□, an optical transmission greater than 80% over the visible range, and a surface roughness of 1.4–2.2-nm RMS over 50×50 µm2 have been obtained for the plastic substrates. These properties are adequate for OLED applications based on United States Display Consortium specifications. Finally, we have found that a combination of hydrogenated amorphous silicon-nitride and silicon-oxide layers deposited on one side of the substrate at low-temperature reduces the water vapor and oxygen transmission rates (TRs) to less than 10−5 g/cm2-day-atm and about 10−7 cc/cm2-day-atm, respectively.
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Hong, Y., He, Z., Lennhoff, N.S. et al. Transparent flexible plastic substrates for organic light-emitting devices. J. Electron. Mater. 33, 312–320 (2004). https://doi.org/10.1007/s11664-004-0137-3
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DOI: https://doi.org/10.1007/s11664-004-0137-3