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Structure and properties of Ti-Si-N coatings synthesized by combining cathode arc and middle-frequency magnetron sputtering

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Abstract

Ti-Si-N composite coatings were synthesized on a novel combining cathode and middle-frequency magnetron sputtering system, designed on an industrial scale. Ti was produced from the arc target and Si from magnetron target during deposition. The influences of negative bias voltage and Si content on the hardness and microstructure of the coatings were investigated. The composite coatings prepared under optimized conditions were characterized to be nc-TiN/a-Si3N4 structure with grain sizes of TiN ranging from 8–15 nm and exhibited a high hardness of 40 GPa. The enhancement of the hardness is suggested to be caused by the nanograin-amorphous structure effects.

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Authors and Affiliations

  1. College of Science, China Three Gorges University, Yichang, 443002, China

    Zhongtian Yang  (杨种田) & Liya Zhu

  2. Power & Mechanical Engineer School, Wuhan University, Wuhan, 430072, China

    Bing Yang

  3. Accelerator Laboratory and Key Laboratory of Acoustic and Photonic, Materials and Devices of Ministry of Education, Wuhan University, Wuhan, 430072, China

    Liping Guo & Dejun Fu  (付德君)

Authors
  1. Zhongtian Yang  (杨种田)
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  2. Liya Zhu
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  3. Bing Yang
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  4. Liping Guo
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  5. Dejun Fu  (付德君)
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Corresponding author

Correspondence to Dejun Fu  (付德君).

Additional information

Funded by the Natural Science Foundation of China(No.10435060 and No. 10675095)

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Yang, Z., Zhu, L., Yang, B. et al. Structure and properties of Ti-Si-N coatings synthesized by combining cathode arc and middle-frequency magnetron sputtering. J. Wuhan Univ. Technol.-Mat. Sci. Edit. 24, 702–705 (2009). https://doi.org/10.1007/s11595-009-5702-4

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  • DOI: https://doi.org/10.1007/s11595-009-5702-4

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