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New Process Simulation Procedure for High-Rate Plasma Jet Machining

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Abstract

Surface figuring using chemically reactive plasma jet machining (PJM) is a promising non-conventional technology for deterministic ultra-precision machining of optical components. Based on chemical reactions between plasma generated radicals and the surface atoms this technology is capable to fabricate complex shaped free form surfaces. Since the material removal rate during PJM depends strongly on the surface temperature which itself is influenced by the jet heat flux to the surface, the arising nonlinear effects on the etch result have to be regarded. Conventionally applied dwell time calculation algorithms do not consider those effects leading to significant machining errors in some cases. In order to improve the machining procedure with respect to deterministic material removal yielding predictable results a process simulation model has been developed. This model considers spatio-temporal variations of surface temperature and temperature dependent material removal and is able to predict the final workpiece topography after machining.

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Acknowledgments

This work has been supported by the German Ministry of Education and Science within the framework of the InnoProfile program 03IP706 “Ultra precision machining using atomic particle beams”. We thank Mr. Andreas Nickel for providing the dwell time calculation software DTCALC.

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  1. Leibniz-Institut für Oberflächenmodifizierung (IOM), Permoserstr. 15, 04318, Leipzig, Germany

    Johannes Meister & Thomas Arnold

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  1. Johannes Meister
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  2. Thomas Arnold
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Correspondence to Johannes Meister.

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Meister, J., Arnold, T. New Process Simulation Procedure for High-Rate Plasma Jet Machining. Plasma Chem Plasma Process 31, 91–107 (2011). https://doi.org/10.1007/s11090-010-9267-y

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