Skip to main content
SpringerLink
Log in

Laser micromachining of silicon and cemented tungsten carbide using picosecond laser pulses in burst mode: ablation mechanisms and heat accumulation

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

This paper presents results obtained by studying material removal of silicon and cemented tungsten carbide using high-frequency ultrashort-pulsed laser radiation. In laser-induced material removal, ablation mechanisms and heat accumulation effects are considered. Depending on the fluence and number of pulses in a burst, structures are created on silicon and cemented tungsten carbide in order to be able to determine the ablated volume. A single pulse in the burst represents the conventionally pulsed laser radiation. Depending on the number of pulses, the ablated volume per pulse rises in the burst. Furthermore, an increase in the number of pulses in the burst results in a repetitive decrease as well as an increase in the ablated volume. Investigations at different ambient pressures establish that this phenomenon could be changed for cemented tungsten carbide under fine vacuum. The simulations demonstrate that the laser-induced heat accumulation in burst mode contributes significantly to the removed volume.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12
Fig. 13
Fig. 14
Fig. 15

Similar content being viewed by others

References

  1. M. Müller, M. Kienel, A. Klenke, T. Gottschall, E. Shestaev, M. Plötner, J. Limpert, A. Tünnermann, Opt. Lett. 41, 3439 (2016)

    Article  ADS  Google Scholar 

  2. P. Lickschat, J. Schille, G. Reiße, S. Weißmantel, DVS-Berichte Band, vol. 307 (DVS Media, Düsseldorf, 2014), pp. 135–143

    Google Scholar 

  3. M.E. Povarnitsyn, T.E. Itina, P.R. Levashov, K.V. Khishchenko, Appl. Surf. Sci. 257, 5168 (2011)

    Article  ADS  Google Scholar 

  4. M.E. Povarnitsyn, V.B. Fokin, P.R. Levashov, T.E. Itina, Phys. Rev. B 92, 232 (2015)

    Article  Google Scholar 

  5. A. Semerok, C. Dutouquet, Thin Solid Films 453–454, 501 (2004)

    Article  Google Scholar 

  6. D.E. Roberts, A. Du Plessis, L.R. Botha, Appl. Surf. Sci. 256, 1784 (2010)

    Article  ADS  Google Scholar 

  7. C.A. Hartmann, J. Laser Micro/Nanoeng. 2, 44 (2007)

    Article  Google Scholar 

  8. T. Donnelly, J.G. Lunney, S. Amoruso, R. Bruzzese, X. Wang, X. Ni, J. Appl. Phys. 106, 013304 (2009)

    Article  ADS  Google Scholar 

  9. W. Hu, Y.C. Shin, G. King, Appl. Phys. A 98, 407 (2009)

    Article  ADS  Google Scholar 

  10. P. Lickschat, A. Demba, S. Weissmantel, Appl. Phys. A 123, 137 (2017)

    Article  ADS  Google Scholar 

  11. T. Kramer, B. Neuenschwander, B. Jäggi, S. Remund, U. Hunziker, J. Zürcher, Phys. Proc. 83, 123 (2016)

    Article  ADS  Google Scholar 

  12. J. Mur, R. Petkovšek, Appl. Phys. A 124, 109 (2018)

    Article  Google Scholar 

  13. D. Metzner, P. Lickschat, S. Weißmantel, Appl. Phys. A 125, 172 (2019)

    Google Scholar 

  14. J. Mildner, C. Sarpe, N. Götte, M. Wollenhaupt, T. Baumert, Appl. Surf. Sci. 302, 291 (2014)

    Article  ADS  Google Scholar 

  15. D.J. Förster, S. Faas, S. Gröninger, F. Bauer, A. Michalowski, R. Weber, T. Graf, Appl. Surf. Sci. 440, 926 (2018)

    Article  ADS  Google Scholar 

  16. M.E. Povarnitsyn, T.E. Itina, K.V. Khishchenko, P.R. Levashov, Phys. Rev. Lett. 103, 195002 (2009)

    Article  ADS  Google Scholar 

  17. N.M. Bulgakova, A.V. Bulgakov, Appl. Phys. A 73, 199 (2001)

    Article  ADS  Google Scholar 

  18. Yong Jee, Michael F. Becker, Rodger M. Walser, J. Opt. Soc. Am. B 5, 648 (1988)

    Article  ADS  Google Scholar 

  19. P. Mannion, J. Magee, E. Coyne and G. M. O’Connor, (SPIE, 2002) p. 470

  20. M. Hashida, A. Semerok, O. Gobert, G. Petite, Y. Izawa, J. Wagner, Appl. Surf. Sci. 197–198, 862 (2002)

    Article  ADS  Google Scholar 

  21. B.N. Chichkov, C. Momma, S. Nolte, F. Alvensleben, A. Tünnermann, Appl. Phys. A Mater. Sci. Process. 63, 109 (1996)

    Article  ADS  Google Scholar 

  22. S. Preuss, A. Demchuk, M. Stuke, Appl. Phys. A Mater. Sci. Process. 61, 33 (1995)

    Article  ADS  Google Scholar 

  23. G. Raciukaitis, J. Laser Micro/Nanoeng. 4, 186 (2009)

    Article  Google Scholar 

  24. T.Y. Choi, C.P. Grigoropoulos, J. Appl. Phys. 92, 4918 (2002)

    Article  ADS  Google Scholar 

  25. S. Fang, L. Llanes, S. Klein, C. Gachot, A. Rosenkranz, D. Bähre, F. Mücklich, IOP Conf. Ser. Mater. Sci. Eng. 258, 012006 (2017)

    Article  Google Scholar 

  26. H.S. Carslaw, Conduction of heat in solids, 2nd edn. (Clarendon Press, Oxford, 1959)

    Google Scholar 

  27. E. Beyer, K. Wissenbach, Oberflächenbehandlung mit Laserstrahlung, Laser in Technik und Forschung (Springer, Berlin, 1998)

    Book  Google Scholar 

  28. J. Penczak, R. Kupfer, I. Bar, R.J. Gordon, Spectrochim. Acta Part B Atomic Spectrosc. 97, 34 (2014)

    Article  ADS  Google Scholar 

  29. J.M. Liu, Opt. Lett. 7, 196 (1982)

    Article  ADS  Google Scholar 

Download references

Acknowledgements

The authors thank the European Social Fund for Germany (ESF) for funding the project Eila-Sax No. 1003 395 06.

figure a

Author information

Authors and Affiliations

  1. University of Applied Sciences Mittweida, Schillerstraße 10, 09648, Mittweida, Germany

    D. Metzner, P. Lickschat & S. Weißmantel

Authors
  1. D. Metzner
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. P. Lickschat
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. S. Weißmantel
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to D. Metzner.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Metzner, D., Lickschat, P. & Weißmantel, S. Laser micromachining of silicon and cemented tungsten carbide using picosecond laser pulses in burst mode: ablation mechanisms and heat accumulation. Appl. Phys. A 125, 462 (2019). https://doi.org/10.1007/s00339-019-2755-x

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s00339-019-2755-x

Search

Navigation