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Platinum–aluminum alloy electrode for retention improvement of gadolinium oxide resistive switching memory

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Abstract

Platinum–aluminum (Pt–Al) alloy top electrode on the retention improvement of gadolinium oxide (Gd x O y ) resistive switching memory was investigated. The aluminum oxide (Al x O y ) formation at the Pt–Al alloy top electrode and Gd x O y interface will lead to the high Schottky barrier height. Further, the more aluminum incorporation can suppress the crystallization of platinum electrode after the post-metallization annealing. Both the crystallization suppression of Pt top electrode and the interfacial aluminum oxide formation will prevent the oxygen ions from out-diffusion through Pt grain boundaries, responsible for the retention enhancement of the Gd x O y resistive switching memory.

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References

  1. K. Nagahara, T. Mukai, N. Ishiwata, H. Hada, S. Tahara, Jpn. J. Appl. Phys. 42, L499 (2003)

    Article  ADS  Google Scholar 

  2. M. Alexe, C. Harnagea, W. Erfurth, D. Hesse, U. Gösele, Appl. Phys. A 70, 247 (2000)

    Article  ADS  Google Scholar 

  3. Y.F. Lai, J. Feng, B.W. Qiao, Y.F. Cai, Y.Y. Lin, T.A. Tang, B.C. Cai, B. Chen, Appl. Phys. A 84, 21 (2006)

    Article  ADS  Google Scholar 

  4. L. Liu, B. Chen, B. Gao, F. Zhang, Y. Chen, X. Liu, Y. Wang, R. Han, J. Kang, Appl. Phys. A 102, 991 (2011)

    Article  ADS  Google Scholar 

  5. R. Waser, M. Aono, Nat. Mater. 6, 833 (2007)

    Article  ADS  Google Scholar 

  6. K. Tsunoda, K. Kinoshita, H. Noshiro, Y. Yamazaki, T. Jizuka, Y. Ito, A. Takahashi, A. Okano, Y. Sato, T. Fukano, M. Aoki, Y. Sugiyama, in IEDM Tech. Dig. (2007), p. 767

    Google Scholar 

  7. S.G. Hu, Y. Liu, T.P. Chen, Z. Liu, Q. Yu, L.J. Deng, Y. Yin, S. Hosaka, Appl. Phys. A 109, 349 (2012)

    Article  ADS  Google Scholar 

  8. H.Y. Jeong, S.K. Kim, J.Y. Lee, S.-Y. Choi, Appl. Phys. A 102, 967 (2011)

    Article  ADS  Google Scholar 

  9. H. Lv, T. Tang, Appl. Phys. A 102, 1015 (2011)

    Article  ADS  Google Scholar 

  10. D. Lee, Y. Sung, I. Lee, J. Kim, H. Sohn, D.-H. Ko, Appl. Phys. A 102, 997 (2011)

    Article  ADS  Google Scholar 

  11. E.-K. Lai, W.-C. Chien, Y.-C. Chen, T.-J. Hong, Y.-Y. Lin, K.-P. Chang, Y.-D. Yao, P. Lin, S.-F. Horng, J. Gong, S.-C. Tsai, C.-H. Lee, S.-H. Hsieh, C.-F. Chen, Y.-H. Shih, K.-Y. Hsieh, R. Liu, C.-Y. Lu, Jpn. J. Appl. Phys. 49, 04DD17 (2010)

    Article  Google Scholar 

  12. X. Cao, X. Li, X. Gao, W. Yu, X. Liu, Y. Zhang, L. Chen, X. Cheng, J. Appl. Phys. 106, 073723 (2009)

    Article  ADS  Google Scholar 

  13. W. Guan, S. Long, Q. Liu, M. Liu, W. Wang, IEEE Electron Device Lett. 29, 434 (2008)

    Article  ADS  Google Scholar 

  14. A. Sawa, Mater. Today 11, 28 (2008)

    Article  Google Scholar 

  15. A. Baikalov, Y.Q. Wang, B. Shen, B. Lorenz, S. Tsui, Y.Y. Sun, Y.Y. Xue, C.W. Chu, Appl. Phys. Lett. 83, 957 (2003)

    Article  ADS  Google Scholar 

  16. Y.L. Chung, P.Y. Lai, Y.C. Chen, J.S. Chen, ACS Appl. Mater. Interfaces 3, 1918 (2011)

    Article  Google Scholar 

  17. J.J. Huang, G.L. Lin, C.W. Kuo, W.C. Chang, T.H. Hou, in Proc. Int. Semiconductor Device Research Symp. Conf. (ISDRS) (2009), p. 1

    Google Scholar 

  18. U. Russo, D. Ielmini, C. Cagli, A.L. Lacaita, IEEE Trans. Electron Devices 56, 193 (2009)

    Article  ADS  Google Scholar 

  19. K.-L. Lin, T.-H. Hou, J. Shieh, J.-H. Lin, C.-T. Chou, Y.-J. Lee, J. Appl. Phys. 109, 084104 (2011)

    Article  ADS  Google Scholar 

  20. H.-Y. Lee, P.-S. Chen, C.-C. Wang, S. Maikap, P.-J. Tzeng, C.-H. Lin, L.-S. Lee, M.-J. Tsai, Jpn. J. Appl. Phys. 46, 2175 (2007)

    Article  ADS  Google Scholar 

  21. H. Lv, M. Wang, H. Wan, Y. Song, W. Luo, P. Zhou, T. Tang, Y. Lin, R. Huang, S. Song, J.G. Wu, H.M. Wu, M.H. Chi, Appl. Phys. Lett. 94, 213502 (2009)

    Article  ADS  Google Scholar 

  22. H.Y. Jeong, J.Y. Lee, S.Y. Choi, Adv. Funct. Mater. 20, 3912 (2010)

    Article  Google Scholar 

  23. H.Y. Jeong, J.Y. Lee, S.Y. Choi, arXiv:1007.2463 (2010)

  24. J.F. Moulder, W.F. Stickle, P.E. Sobol, K.D. Bomben, in Handbook of X-Ray Photoelectron Spectroscopy, ed. by E. Prairie (Perkin-Elmer Corp., Waltham, 1992), p. 181

    Google Scholar 

  25. F. Sen, G. Gökağç, J. Phys. Chem. C 111, 5715 (2007)

    Article  Google Scholar 

  26. O. Bose, E. Kemnitz, A. Lippitz, W.E.S. Unger, Fresenius J. Anal. Chem. 358, 175 (1997)

    Article  Google Scholar 

  27. J.-C. Wang, Y.-R. Ye, J.-S. Syu, P.-R. Wu, C.-I. Wu, P.-S. Wang, J.-H. Chang, Jpn. J. Appl. Phys. 52, 04CD07 (2013)

    Article  Google Scholar 

  28. A. Kovács, P.B. Barna, J.L. Lábár, Thin Solid Films 433, 78 (2003)

    Article  ADS  Google Scholar 

  29. G. Zhang, Z.-G. Shao, W. Lu, F. Xie, H. Xiao, X. Qin, B. Yi, Appl. Catal. B, Environ. 132–133, 183 (2013)

    Article  Google Scholar 

Download references

Acknowledgements

This work was supported by the National Science Council, R.O.C. under the contract No. of NSC101-2221-E-182-053.

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Authors and Affiliations

  1. Department of Electronic Engineering, Chang Gung University, Kweishan, 333, Taoyuan, Taiwan

    Jer-Chyi Wang, De-Yuan Jian & Yu-Ren Ye

  2. Department of Material Engineering and Center for Thin Film Technologies and Applications, Ming Chi University of Technology, Taishan, 24301, New Taipei City, Taiwan

    Li-Chun Chang

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  1. Jer-Chyi Wang
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  2. De-Yuan Jian
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Correspondence to Jer-Chyi Wang.

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Wang, JC., Jian, DY., Ye, YR. et al. Platinum–aluminum alloy electrode for retention improvement of gadolinium oxide resistive switching memory. Appl. Phys. A 113, 37–40 (2013). https://doi.org/10.1007/s00339-013-7874-1

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  • DOI: https://doi.org/10.1007/s00339-013-7874-1

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