Skip to main content
SpringerLink
Log in

Secondary processes in the evolution of sputter-topographies

  • Papers
  • Published:
Journal of Materials Science Aims and scope Submit manuscript

Abstract

Topographies of silica glass surfaces developed by 20 keV Ar+ irradiation contain features which are not adequately explained by considering only the variation of sputtering yield with the ion-incidence angle. These features are sharply defined and could lead to serious misinterpretation of specimen structures when sputter-erosion is used as a microscopic sectioning technique. Three mechanisms are discussed which together could account for the observed discrepancies, the first being ion-reflection at grazing incidence, the second the phenomenon of forward-peaked emission of high-energy secondary particles under irradiation at high angles of incidence and the third being re-deposition of sputtered material onto closely adjacent planes. A general expression is derived for this latter mechanism for a cosine spatial distribution of sputtered particles.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. H. Bach,J. Non-Cryst. Solids 3 (1970) 1.

    Article  Google Scholar 

  2. J. S. Colligon, Report on the Atomic Collisions in Solids Group Meeting, Sept. 1970,Phys. Bull. (Institute of Physics, London)21 (1970) 518.

    Google Scholar 

  3. G. Carter andJ. S. Colligon, Ion Bombardment of Solids (Heinemann, London 1968).

    Google Scholar 

  4. R. G. Wilson,Opt. and Laser Technol. 2 (1970) 19.

    Article  Google Scholar 

  5. A. D. G. Stewart andM. W. Thompson,J. Mater. Sci. 4 (1969) 61.

    Article  Google Scholar 

  6. M. Nobes, J. S. Colligon, andG. Carter,ibid 6 (1971) 115.

    Article  Google Scholar 

  7. A. R. Bayly andP. D. Townsend,Opt. and Laser Technol. 2 (1970) 117.

    Article  Google Scholar 

  8. G. K. Wehner,Phys. Rev. 114 (1959) 1270.

    Article  CAS  Google Scholar 

  9. H. H. Andersen, Proc. Internat. Conf. Atomic Collision Phenomena in Solids p. 300 (North-Holland Amsterdam, London, 1970).

    Google Scholar 

  10. A. D. Marwick, M. W. Thompson, B. W. Farmery, andG. S. Harbinson, to be published in Radiation Effects.

  11. M. W. Thompson,Phil. Mag. 18 (1968) 377.

    CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. School of Mathematical and Physical Sciences, University of Sussex, Brighton, UK

    A. R. Bayly

Authors
  1. A. R. Bayly
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Bayly, A.R. Secondary processes in the evolution of sputter-topographies. J Mater Sci 7, 404–412 (1972). https://doi.org/10.1007/BF02403403

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF02403403

Keywords

Search

Navigation