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Microtopography of surfaces eroded by ion-bombardment

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Abstract

Conical protrusions have been observed in the scanning electron microscope on surfaces that have been eroded by sputtering under 5 to 8 keV A+ ion bombardment. It is shown why these have a half-angle corresponding to the principal peak in the graph of sputtering rate versus angle of ion incidence. These lead to some general conclusions on the microtopography ofion-eroded surfaces.

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Authors and Affiliations

  1. Cambridge Instrument Company Limited, London SW1, UK

    A. D. G. Stewart

  2. Physics Laboratory, University of Sussex, Brighton, UK

    M. W. Thompson

Authors
  1. A. D. G. Stewart
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  2. M. W. Thompson
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Stewart, A.D.G., Thompson, M.W. Microtopography of surfaces eroded by ion-bombardment. J Mater Sci 4, 56–60 (1969). https://doi.org/10.1007/BF00555048

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  • DOI: https://doi.org/10.1007/BF00555048

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