Abstract
Gold-containing plasma-polymerized fluorocarbon thin films have been deposited in an RF glow discharge fed with hexafluoroethane, while a gold target was simultaneously sputtered. Tile temperatureT s and RF-induced biasU s of a third electrode, used as a substrate holder, were separately varied. The influence ofT s andU s on the plasma and file lihn characteristics were individually studied using actinometric optical emission spectroscopy, X-ray photoelectron spectroscopy, infrared spectroscopy, and measurements of optical transmission and surface contact angles. IncreasingU s (up to −200 V) andT s (up to 90°C) resulted in similar effects, namely a higher degree of cross-linking, higher gold concentration, better film stability with time, and increased wettability. A key role of the energy flux of particles impinging on the growing surface has been shown to account far the experimental results.
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On leave from the Faculty of Mathematics and Physics, Charles University, Praha, Czechoslovakia.
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d'Agostino, R., Martinů, L. & Pische, V. Effect of bias and temperature on the bulk and surface properties of gold-containing plasma-polymerized fluorocarbons. Plasma Chem Plasma Process 11, 1–13 (1991). https://doi.org/10.1007/BF01447031
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DOI: https://doi.org/10.1007/BF01447031