Abstract
The present status of experimental and theoretical work on continuous wave laser-assisted reaction of metals with oxygen is presented. Differences between this and normal isothermal oxidation of metals are emphasized. Available theoretical models are discussed. They deal with roles of thermal history, feedback effects between optical absorption and reaction rate. The nature of so-called “non-purely thermal” effects is discussed. Hints for further research are presented.
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References
D. Bäuerle: Chemical Processing with Lasers (Springer, Berlin, Heidelberg 1986)
M. von Allmen: Laser-Beam Interactions with Materials (Springer, Berlin, Heidelberg 1987)
I.W. Boyd: Laser Processing of Thin Films and Microstructures (Springer, Berlin, Heidelberg 1988)
I. Ursu, I.N. Mihailescu, A.M. Prokhorov, V.I. Konov: Interactinuea Radiatiei Laser cu Metalele (Editura Academici, Bucharest 1986)
G. Daurelio, M. Dell'Erba, L. Cento: Lasers Appl. 5, 59 (1986)
K.H. Guenther: SPIE Proc. 801, 200 (1987)
R. Andrew, L. Baufay, A. Pigeolet, M. Wautelet: Mat. Res. Soc. Symp. Proc. 17, 283 (1983)
M. Thuillard, M. von Allmen: Appl. Phys. Lett. 47, 936 (1985)
M. Thuillard, M. von Allmen: Appl. Phys. Lett. 48, 1045 (1986)
M. Thuillard, M. von Allmen: Proc. E-MRS-XI, ed. by D. Bäuerle, K.L. Kompa, L.D. Laude 137 (1986)
F.V. Bunkin, N.A. Kirichenko, B.S. Luk'Yanchuk, G.A. Shafeev: Sov. J. Quant. Electron. 12, 1191 (1982)
V.A. Bobyrev, F.V. Bunkin, E. Dèli, N.A. Kirichenko, B.S. Luk'Yanchuk, L. Nanai, A.V. Simakin, I. Hevesi, G.A. Shafeev: Sov. J. Quant. Electron. 12, 1267 (1982)
I. Ursu, L. Nanu, M. Dinescu, Al. Hening, I.N. Mihailescu, L.C. Nistor, V.S. Teodorescu, E. Szil, I. Hevesi, J. Kovacs, L. Nanai: Appl. Phys. A 35, 103 (1984)
L. Nanai, I. Hevesi, F.V. Bunkin, B.S. Luk'Yanchuk, G.A. Shafeev, D.T. Alimov: Infrared Phys. 25, 141 (1985)
T. Szörenyi, L. Baufay, M.C. Joliet, F. Hanus, R. Andrew: Appl. Phys. A 39, 251 (1986)
P. Quenon, O. Toubeau, M. Wautelet: SPIE Proc. (in press)
S. Metev, S. Savtchenko, K. Stamenov: J. Phys. D: Appl. Phys. 13, 475 (1980)
I. Ursu, V.S. Teodorescu, L.C. Nistor, I.N. Mihailescu, M. Mihailescu: J. Mod. Opt. 34, 1121 (1987)
D.T. Alimov, V.L. Zhuravskii, V.K. Tyugai, P.K. Khabibullaev: Bull. Acad. Sci. USSR — Phys. Series 51, 1170 (1987)
A. Mesarwi, A. Ignatiev, J.S. Liu: Solid State Commun. 65, 319 (1988)
F.V. Bunkin, N.A. Kirichenko, V.I. Konov, B.S. Luk'Yanchuk: Sov. J. Quant. Electron. 10, 891 (1980)
D.T. Alimov, V.A. Bobyrev, F.V. Bunkin, N.A. Kirichenko, B.S. Luk'Yanchuk, Yu.N. Mitin, A.I. Omel'chenko, A.V. Simakin, P.K. Khabibullaev: Sov. Phys. Dokl. 28, 150 (1983)
I. Ursu, L.C. Nistor, V.S. Teodorescu, I.N. Mihailescu, I. Apostol, L. Nanu, A.M. Prokhorov, N.I. Chapliev, V.I. Konov, V.N. Tokarev, V.G. Ralchenko: SPIE Proc. 398, 398 (1983)
I. Ursu, L.C. Nistor, V.S. Teodorescu, I.N. Mihailescu, L. Nanu, A.M. Prokhorov, N.I. Chapliev, V.I. Konov: Appl. Phys. Lett. 44, 188 (1984)
I. Ursu, L. Nanu, I.N. Mihailescu, L.C. Nistor, V.S. Teodorescu, A.M. Prokhorov, V.I. Konov, N.I. Chapliev: J. Physique Lett. 45, L737 (1984)
M. Wautelet: Mat. Lett. 2, 20 (1983)
M. Wautelet, L. Baufay: Thin Solid Films 100, L9 (1983)
R. Andrew: Appl. Phys. B 41, 205 (1986)
M. Wautelet, R. Andrew: Philos. Mag. B 55, 261 (1987)
L. Baufay, F.A. Houle, R. Wilson: J. Appl. Phys. 61, 4640 (1987)
M. Wautelet, L.D. Laude, F. Hanus, K.-H. Heinig: Appl. Phys. A 47, 313 (1988)
M. Wautelet, L. Baufay, M.C. Joliet, R. Andrew: Thin Solid Films 129, L67 (1985)
M. Hansen: Constitution of Binary Alloys (McGraw-Hill, New York 1958)
G.V. Samsonov: The Oxide Handbook (IFI/Plenum, New York 1973)
A. Mukherjee, S.P. Wach: J. Less Common. Met. 92, 289 (1983)
M. Wautelet, P. Quenon, A. Jadin: Semicond. Sci. Technol. 3, 54 (1988)
M. Wautelet, E.D. Gehain, P. Quenon: Phys. Stat. Solidi (b) 149, 465 (1988)
B.S. Luk'Yanchuk: In Lasers and Applications, ed. by I. Ursu, A.M. Prokhorov (CIP Press, Bucharest 1983) p. 771
L.D. Laude, M. Wautelet, R. Andrew: Appl. Phys. A 40, 133 (1986)
J.M. Poate, K.N. Tu, J.W. Mayer (eds.): Thin Films — Interdiffusion and Reactions (Wiley, New York 1978)
M.F. von Allmen, S.S. Lau: In Laser Annealing of Semiconductors, ed. by J.M. Poate, J.W. Mayer (Academic, New York 1982) p. 439
M. Wautelet, L.D. Laude, C. Antoniadis: Mat. Chem. Phys. 14, 57 (1986)
V. Gösele, K.N. Tu: J. Appl. Phys. 53, 3252 (1982)
F.V. Bunkin, N.A. Kirichenko, B.S. Luk'Yanchuk: Sov. Phys. Usp. 25, 662 (1982)
M. Wautelet: J. Appl. Phys. 65, 4033 (1989)
J.F. Ready: Effects of High Power Laser Radiation (Academic, New York 1971)
M.A. Abramowitz, I.A. Stegun: Handbook of Mathematical Functions (Dover, New York 1970) p. 940
A.T. Fromhold, Jr.: Theory of Metal Oxidation (North-Holland, Amsterdam 1976)
A. Atkinson: Rev. Mod. Phys. 57, 437 (1985)
Y. Adda, J. Philibert: La diffusion dans les solides (PUF, Paris 1966)
M. Wautelet, P. Quenon, C. Antoniadis, L.D. Laude: Semicond. Sci. Techn. 2, 453 (1987)
I. Ursu, L. Nanu, I.N. Mihailescu: Appl. Phys. Lett. 49, 109 (1986)
E.M. Young, W.A. Tiller: Appl. Phys. Lett. 50, 80 (1987)
I.W. Boyd, F. Micheli: Electron. Lett. 23, 298 (1987)
E.M. Young, W.A. Tiller: Appl. Phys. Lett. 50, 46 (1987)
P. Quenon, M. Wautelet, M. Dumont: J. Appl. Phys. 61, 3112 (1987)