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Composition Optimization of Slurry for Polishing TA31 Titanium Alloy with Free Abrasive

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Abstract

The composition of polishing slurry plays an important role in the material removal rate (MRR) and surface roughness of titanium alloy. In this study, chemical mechanical polishing (CMP) was used to polish TA31 titanium alloy, the MRR and surface roughness of the titanium alloy were used as evaluation indicators, and the abrasive concentration (A), H2O2 concentration (B), and pH (C) were used as the influencing factors to carry out the orthogonal experiment of titanium alloy free abrasive polishing. In this study, the composition of the polishing slurry was optimized, and the oxidation–reduction potential (ORP) of different polishing slurries was detected. Furthermore, the mechanism of the influence of the composition of different polishing slurries and ORP on the removal of polishing materials was discussed. The results of the study show that the best polishing rate is 43.991 nm/min, and the best surface roughness is 0.045 μm. The order of significant factors affecting the removal rate of titanium alloy is A (abrasive concentration) > B (H2O2 concentration) > C (pH), and the order of significant factors affecting the surface roughness of titanium alloy is C (pH) > A (abrasive concentration) > B (H2O2 concentration). The optimal slurry composition for material removal rate is abrasive concentration of 3%, H2O2 concentration of 5% and pH = 3, and the optimal slurry composition for surface roughness is abrasive concentration of 3%, H2O2 concentration of 5% and pH = 12. The research can lay an experimental foundation for further study on the mechanism of CMP of TA31 titanium alloy.

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References

  1. D. Banerjee, J.C. Williams, Perspectives on titanium science and technology. Acta Mater. 61(3), 844–879 (2013)

    Article  Google Scholar 

  2. I.V. Gorynin, Titanium alloys for marine application. Mater. Sci. Eng., A 263(2), 112–116 (1999)

    Article  Google Scholar 

  3. B. Golaz, V. Michaud, S. Lavanchy et al., Design and durability of titanium adhesive joints for marine applications. Int. J. Adhes. Adhes. 45, 150–157 (2013)

    Article  Google Scholar 

  4. Y.Q. Jiang, Y.C. Lin, X.Y. Zhang et al., Isothermal tensile deformation behaviors and fracture mechanism of Ti–5Al–5Mo–5V–1Cr–1Fe alloy in β phase field. Vacuum 156, 187–197 (2018)

    Article  Google Scholar 

  5. B. Wang, P. Lei, G. Ma et al., Microstructure and properties of Ti80 alloy fabricated by hydrogen-assisted blended elemental powder metallurgy. Front. Mater. 7, 291 (2020)

    Article  Google Scholar 

  6. N. Erbin, Lu. Li Man, C.L. Chang, Microstructure and mechanical properties of TA31 cast titanium alloy. Special Casting & Nonferrous Alloys. 39(10), 1135–1137 (2019)

    Google Scholar 

  7. Gao F, Yu W, Song D, et al. Fracture toughness of TA31 titanium alloy joints welded by electron beam welding under constrained condition. Mater. Sci. Eng. 772(Jan.20), 138612.1–138612.7 (2020)

  8. Z. Suyin, D. Kai, X. Pifeng et al., Investigation on electropolishing of Ti film. High Power Laser & Particle Beams. 19(09), 1479–1482 (2007)

    Google Scholar 

  9. G.R. Dale, J.W.J. Hamilton, P.S.M. Dunlop et al., Electrochemical growth of titanium oxide nanotubes: the effect of surface roughness and applied potential. J. Nanosci. Nanotechnol. 9(7), 4215 (2009)

    Article  Google Scholar 

  10. K. Lu, Z. Tian, J.A. Geldmeier, Polishing effect on anodic titania nanotube formation. Electrochim. Acta 56(17), 6014–6020 (2011)

    Article  Google Scholar 

  11. M. Nakai, M. Niinomi, H. Tsutsumi, K. Saito, T. Goto, Calcium phosphate coating of biomedical titanium alloys using metal–organic chemical vapour deposition. Mater. Technol. 30(B1), B8–B12 (2015)

    Article  Google Scholar 

  12. R.A. Difelice, J.G. Dillard, D. Yang, Chemical and nanomechanical properties of plasma-polymerized acetylene on titanium and silicon. Int. J. Adhes. Adhes. 25(4), 342–351 (2005)

    Article  Google Scholar 

  13. Su. Jian-xiu, K. Ren-ke, G. Dong-ming, Technology analysis of wafer chemical mechanical polishing in the manufacture of ULSI. Semiconductor Technol. 10, 27–32 (2003)

    Google Scholar 

  14. D. Yuan-jing, P. Hui-fang, P. Guo-shun, L. Yan, Nanoscale planarization mechanism of titanium chemical mechanical polishing. Tribology 31(02), 131–136 (2011)

    Google Scholar 

  15. Z. Zhang, Z. Shi, Y. Du et al., A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry. Appl. Surf. Sci. 427, 409–415 (2018)

    Article  Google Scholar 

  16. H. Tomoda, K. Kitajima, Development of polishing fluids for titanium alloy using lapping tape—effects of components in the polishing fluids on polishing characteristics. Int. J. Autom. Technol. 7(3), 300–305 (2013)

    Article  Google Scholar 

  17. R.M. Kaushik, A.B. Bhandakkar, T.U. Patro, Solution of emulsifiable oil and hydrogen peroxide for chemical–mechanical polishing of Ti alloy—A green approach. Mater Lett. 122(may 1), 252–255 (2014)

    Article  Google Scholar 

  18. A. Kadic, P. Chylenski, M. Hansen et al., Oxidation-reduction potential (ORP) as a tool for process monitoring of H2O2/LPMO assisted enzymatic hydrolysis of cellulose. Process Biochem. 86(Nov), 89–97 (2019)

    Article  Google Scholar 

  19. F.A. Koch, W.K. Oldham, Oxidation-reduction potential – a tool for monitoring, control and optimization of biological nutrient removal systems. Wat. Sci. Tech. 17(11), 259–281 (1985)

    Article  Google Scholar 

  20. W. Zhu, Mechanism of H2O2 decomposition catalysed by ethylenediaminetetraacetatoirqn ( III ) complex. Chin. J. Catal. 18(1), 83–86 (1997)

    Google Scholar 

  21. W. Yan-ling, Li. Li-jun, The preparation of electrode modified with silver /ethylenediamine and the catalysis with modified electrode to hydrogen peroxide. J. Huaibei Normal Univ. (Natural Sci.) 32(01), 47–49 (2011)

    Google Scholar 

  22. S.Y. Chiu, Y.L. Wang, C.P. Liu et al., The application of elecrochemical metrologies for investigating chemical mechanical polishing of Al with a Ti barrier layer. Mater. Chem. Psysl. 82(2), 444–445 (2003)

    Google Scholar 

  23. C. Liang, W. Liu, S. Li, H. Kong, Z. Zhang, Z. Song, A nano-scale mirror-like surface of Ti–6Al–4V attained by chemical mechanical polishing. Chin. Phys. B. 25(05), 445–451 (2016)

    Google Scholar 

  24. X. Lei, X. Wang, Corrosion behavior of titanium in hydrogen peroxide solutions. Rare Metal Mater. Eng. 35(8), 1219–1222 (2006)

    Google Scholar 

  25. X. Fu, H. Yang, H. Sun, G. Lu, J. Wu, The multiple roles of ethylenediamine modification at TiO2/activated carbon in determining adsorption and visible-light-driven photoreduction of aqueous Cr(VI). J. Alloys Compounds 662, 165–172 (2016)

    Article  Google Scholar 

  26. H. Li, Y. Hao, H. Lu et al., A systematic study on visible-light N-doped TiO2 photocatalyst obtained from ethylenediamine by sol–gel method. Appl. Surface Sci. 344(jul 30), 112–118 (2015)

    Article  Google Scholar 

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Funding

This study was funded by the National Natural Science Foundation of China (U1804142), China Postdoctoral Science Foundation (2020M672220), Science and Technology Plan Projects of Henan Province (212102210062), Postdoctoral Research Project of Henan Province (201903045), the Program for Innovative Research Team (in Science and Technology) in University of Henan Province (Grant no. 20IRTSTHN016).

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Authors and Affiliations

  1. Henan Institute of Science and Technology, 453003, Xinxiang, People’s Republic of China

    Zhankui Wang, Zhao Zhang, Shiwei Wang, Yabo Wu, Minghua Pang, Lijie Ma, Yongfeng Li & Jianxiu Su

  2. Henan University of Science and Technology, 471023, Luoyang, People’s Republic of China

    Zhankui Wang

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  1. Zhankui Wang
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  2. Zhao Zhang
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  3. Shiwei Wang
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Correspondence to Zhankui Wang.

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Wang, Z., Zhang, Z., Wang, S. et al. Composition Optimization of Slurry for Polishing TA31 Titanium Alloy with Free Abrasive. J. Inst. Eng. India Ser. E 102, 377–386 (2021). https://doi.org/10.1007/s40034-021-00230-4

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  • DOI: https://doi.org/10.1007/s40034-021-00230-4

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