Abstract
Recent advances in electron optics and detection systems have enabled the scanning electron microscope (SEM) for usage of the low acceleration voltages. The resulting advantages of better spatial resolution and surface sensitivity are also true for energy dispersive X-ray spectroscopy (EDX). However, the EDX-detectors can still be improved for the use at low energies.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Similar content being viewed by others
References
I kindly acknowledge the support by Bruker AXS Microanalysis. Special thanks are due to Tobias Salge.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2008 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Gernert, U. (2008). Comparing the Si(Li)-detector and the silicon drift detector (SDD) using EDX in SEM. In: Luysberg, M., Tillmann, K., Weirich, T. (eds) EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-85156-1_349
Download citation
DOI: https://doi.org/10.1007/978-3-540-85156-1_349
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-85154-7
Online ISBN: 978-3-540-85156-1
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)