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Calorimetric Probes for Energy Flux Measurements in Process Plasmas

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Complex Plasmas

Part of the book series: Springer Series on Atomic, Optical, and Plasma Physics ((SSAOPP,volume 82))

Abstract

This chapter gives an overview of the method of calorimetric probes which are used for characterizing the interaction between low-temperature plasmas and substrates in materials processing. Although the focus is on low-temperature non-equilibrium plasmas most of the concepts can also be transferred to thermal plasmas or are in fact adopted from fusion research. An introductory section showing the importance and complexity of plasma wall interactions is followed by a section providing an overview and comparison of various probe concepts, which have been developed in the last decades. Special focus is on the type of probes which are similar to the probes used by J.A. Thornton (In fact, Thornton was not the first, to use this type of probe. From his work from 1978 [1], one can follow the citations back to the work of Jackson in 1969, who used equation (6.7) for the determination of the power dissipated by a copper block located at substrate position in a sputtering discharge [2]) who was one of the pioneers connecting plasma characteristics with resulting surface properties. Thereafter, a short section gives a basic overview of the different contributions to the total energy influx and which are of importance for the plasma wall interaction. The last section shows different examples of applications of calorimetric probes. It demonstrates the applicability and flexibility of these types of probes for characterization of different low-temperature plasmas. The examples mainly focus on complex plasmas, where the variety of the involved processes also causes a specific plasma wall interaction. Such complex situations can be found in systems where reactive gases or gas mixtures, nano or micro particles (dust), magnetic fields or large surface to volume ratios are involved.

Sections of this chapter are reprinted from: Sven Bornholdt: Particle and Energy Fluxes During Plasma Based Deposition of Nanostructured Materials. PhD thesis, Kiel University (2013)

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Acknowledgments

The authors would like to thank M. Stahl, T. Trottenberg, V. Schneider, N. Bergemann, J. Teliban, N. Itagaki, K. Koga, G. Uchida, K. Kuwahara, K. Nishiyama, M. Shiratani, H. Wulff, M. Häckel and K.D. Weltmann for their kind contributions. Also the fruitful discussions with M. Wolter, J. Ye, S. Ulrich, A. Winter, T. Peter. V. Zaporojchenko, T. Strunskus, F. Faupel, P.A. Cormier, A.L. Thomann, D. Lundin, U. Helmerson, C. Roth, V. Zuber, A. Sonnenfeld, P. Rudolph von Rohr and K. Ostrikov are greatfully acknowledged. This work were financially supported under the DFG via SFB/TR 24 project B13.

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  1. Institut für Experimentelle und Angewandte Physik, Christian-Albrechts-Universität zu Kiel, Leibnizstr. 19, 24098, Kiel, Germany

    Sven Bornholdt, Maik Fröhlich & Holger Kersten

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  1. Sven Bornholdt
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  1. Astrophysik Lehrstuhl Statistische Physik, Christian-Albrechts-Universität zu Kiel Institut für Theoretische Physik und, Kiel, Germany

    Michael Bonitz

  2. Seton Hall University, South Orange, New Jersey, USA

    Jose Lopez

  3. Polytechnic Institute of New York University, Brooklyn, New York, USA

    Kurt Becker

  4. Institut für Theoretische Physik und Astrophysik, Christian-Albrechts-Universität zu Kiel, Kiel, Germany

    Hauke Thomsen

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Bornholdt, S., Fröhlich, M., Kersten, H. (2014). Calorimetric Probes for Energy Flux Measurements in Process Plasmas. In: Bonitz, M., Lopez, J., Becker, K., Thomsen, H. (eds) Complex Plasmas. Springer Series on Atomic, Optical, and Plasma Physics, vol 82. Springer, Cham. https://doi.org/10.1007/978-3-319-05437-7_6

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