Abstract
Secondary electrons (SE) are created when inelastic scattering of the beam electrons ejects weakly bound valence electrons (in the case of ionically or covalently bonded materials) or conduction band electrons (in the case of metals), which have binding energies of ~ 1–15 eV to the parent atom(s). Secondary electrons are quantified by the parameter δ, which is the ratio of secondary electrons emitted from the specimen, NSE, to the number of incident beam (primary) electrons, NB:
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Goldstein, J.I., Newbury, D.E., Michael, J.R., Ritchie, N.W.M., Scott, J.H.J., Joy, D.C. (2018). Secondary Electrons. In: Scanning Electron Microscopy and X-Ray Microanalysis. Springer, New York, NY. https://doi.org/10.1007/978-1-4939-6676-9_3
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