Abstract
Secondary electrons (SE) are created when inelastic scattering of the beam electrons ejects weakly bound valence electrons (in the case of ionically or covalently bonded materials) or conduction band electrons (in the case of metals), which have binding energies of ~ 1–15 eV to the parent atom(s). Secondary electrons are quantified by the parameter δ, which is the ratio of secondary electrons emitted from the specimen, NSE, to the number of incident beam (primary) electrons, NB:
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References
Bongeler R, Golla U, Kussens M, Reimer L, Schendler B, Senkel R, Spranck M (1993) Electron-specimen interactions in low voltage scanning electron microscopy. Scanning 15:1
Joy D (2012) Can be found in chapter 3 on SpringerLink: http://link.springer.com/chapter/10.1007/978-1-4939-6676-9_3
Kanaya K, Ono S (1984) Interaction of electron beam with the target in scanning electron microscope. In: Kyser DF, Niedrig H, Newbury DE, Shimizu R (eds) Electron interactions with solids. SEM, Inc, Chicago, pp 69–98
Koshikawa T, Shimizu R (1973) Secondary electron and backscattering measurements for polycrystalline copper with a retarding-field analyser. J Phys D Appl Phys 6:1369
Koshikawa T, Shimizu R (1974) A Monte Carlo calculation of low-energy secondary electron emission from metals. J Phys D Appl Phys 7:1303
Peters K-R (1984) Generation, collection and properties of an SE-I enriched signal suitable for high resolution SEM on bulk specimens. In: Kyser DF, Niedrig H, Newbury DE, Shimizu R (eds) Electron beam interactions with solids. SEM, Inc, AMF O’Hare, p 363
Moncrieff DA, Barker PR (1976) Secondary electron emission in the scanning electron microscope. Scanning 1:195
Reimer L, Tolkamp C (1980) Measuring the backscattering coefficient and secondary electron yield inside a scanning electron microscope. Scanning 3:35
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Goldstein, J.I., Newbury, D.E., Michael, J.R., Ritchie, N.W.M., Scott, J.H.J., Joy, D.C. (2018). Secondary Electrons. In: Scanning Electron Microscopy and X-Ray Microanalysis. Springer, New York, NY. https://doi.org/10.1007/978-1-4939-6676-9_3
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DOI: https://doi.org/10.1007/978-1-4939-6676-9_3
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