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The Physics of Microfabrication

  • Ivor Brodie
  • Julius J. Muray

Table of contents

  1. Front Matter
    Pages i-xix
  2. Ivor Brodie, Julius J. Muray
    Pages 1-78
  3. Ivor Brodie, Julius J. Muray
    Pages 79-225
  4. Ivor Brodie, Julius J. Muray
    Pages 227-265
  5. Ivor Brodie, Julius J. Muray
    Pages 267-348
  6. Ivor Brodie, Julius J. Muray
    Pages 349-412
  7. Ivor Brodie, Julius J. Muray
    Pages 413-442
  8. Ivor Brodie, Julius J. Muray
    Pages 443-463
  9. Back Matter
    Pages 465-503

About this book

Introduction

The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro­ fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need.

Keywords

development electronics microscopy optics thin film thin films

Authors and affiliations

  • Ivor Brodie
    • 1
  • Julius J. Muray
    • 1
  1. 1.SRI International (formerly Stanford Research Institute)Menlo ParkUSA

Bibliographic information