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Particle Beams: Sources, Optics, and Interactions

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The Physics of Microfabrication

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Abstract

A key element in our ability to view, fabricate, and in some cases operate microdevices has been the availability of tightly focused particle beams, particularly of photons, electrons, and ions. Consideration of diffraction effects leads to the general rule that if one wishes to focus a beam of particles into a spot of a given size, the wavelength associated with the particles must be less than the required spot diameter. In Table 1 are listed the wavelengths (in μm) of three particles (photons, electrons, and protons) at various energies.

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  1. SRI International (formerly Stanford Research Institute), Menlo Park, California, USA

    Ivor Brodie & Julius J. Muray

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Brodie, I., Muray, J.J. (1982). Particle Beams: Sources, Optics, and Interactions. In: The Physics of Microfabrication. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-2160-4_2

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