Scanning Electron Microscopy and X-ray Microanalysis

Third Edition

  • Joseph I. Goldstein
  • Dale E. Newbury
  • Patrick Echlin
  • David C. Joy
  • Charles E. Lyman
  • Eric Lifshin
  • Linda Sawyer
  • Joseph R. Michael

Table of contents

  1. Front Matter
    Pages i-xix
  2. Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 1-20
  3. Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 21-60
  4. Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 61-98
  5. Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 99-193
  6. Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 195-270
  7. Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 271-296
  8. Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 297-353
  9. Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 355-390
  10. Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 391-451
  11. Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 453-536
  12. Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 537-564
  13. Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 565-590
  14. Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 591-619
  15. Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 621-645
  16. Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 647-673
  17. Back Matter
    Pages 675-690

About this book

Introduction

In the decade since the publication of the second edition of Scanning Electron Microscopy and X-Ray Microanalysis, there has been a great expansion in the capabilities of the basic scanning electron microscope (SEM) and the x-ray spectrometers. The emergence of the variab- pressure/environmental SEM has enabled the observation of samples c- taining water or other liquids or vapor and has allowed for an entirely new class of dynamic experiments, that of direct observation of che- cal reactions in situ. Critical advances in electron detector technology and computer-aided analysis have enabled structural (crystallographic) analysis of specimens at the micrometer scale through electron backscatter diffr- tion (EBSD). Low-voltage operation below 5 kV has improved x-ray spatial resolution by more than an order of magnitude and provided an effective route to minimizing sample charging. High-resolution imaging has cont- ued to develop with a more thorough understanding of how secondary el- trons are generated. The ?eld emission gun SEM, with its high brightness, advanced electron optics, which minimizes lens aberrations to yield an - fective nanometer-scale beam, and “through-the-lens” detector to enhance the measurement of primary-beam-excited secondary electrons, has made high-resolution imaging the rule rather than the exception. Methods of x-ray analysis have evolved allowing for better measurement of specimens with complex morphology: multiple thin layers of different compositions, and rough specimens and particles. Digital mapping has transformed classic x-ray area scanning, a purely qualitative technique, into fully quantitative compositional mapping.

Keywords

Apertur Filter Helium-Atom-Streuung STEM ceramics coating diffraction electron diffraction electron microscope electron microscopy liquid microscopy optics scanning electron microscope structural analysis

Authors and affiliations

  • Joseph I. Goldstein
    • 1
  • Dale E. Newbury
    • 2
  • Patrick Echlin
    • 3
  • David C. Joy
    • 4
  • Charles E. Lyman
    • 5
  • Eric Lifshin
    • 6
  • Linda Sawyer
    • 7
  • Joseph R. Michael
    • 8
  1. 1.University of MassachusettsAmherstUSA
  2. 2.National Institute of Standards and TechnologyGaithersburgUSA
  3. 3.Cambridge Analytical Microscopy Ltd.CambridgeEngland
  4. 4.University of TennesseeKnoxvilleUSA
  5. 5.Lehigh UniversityBethlehemUSA
  6. 6.State University at AlbanyAlbanyUSA
  7. 7.Ticona LLCSummitUSA
  8. 8.Sandia National LaboratoriesAlbuquerqueUSA

Bibliographic information

  • DOI https://doi.org/10.1007/978-1-4615-0215-9
  • Copyright Information Springer Science + Business Media, LLC 2003
  • Publisher Name Springer, Boston, MA
  • eBook Packages Springer Book Archive
  • Print ISBN 978-1-4613-4969-3
  • Online ISBN 978-1-4615-0215-9
  • About this book