MEMS-based Circuits and Systems for Wireless Communication

  • Christian C Enz
  • Andreas Kaiser

Part of the Integrated Circuits and Systems book series (ICIR)

Table of contents

  1. Front Matter
    Pages i-xii
  2. NEMS/MEMS Devices

    1. Front Matter
      Pages 1-1
    2. Marc-Alexandre Dubois, Claude Muller
      Pages 3-28
    3. Adrian Ionescu
      Pages 55-94
    4. Bertrand Dubus
      Pages 95-117
  3. MEMS-Based Circuits

    1. Front Matter
      Pages 119-119
    2. Eric A. Vittoz
      Pages 121-154
    3. Shailesh S. Rai, Brian P. Otis
      Pages 187-205
    4. Stéphane Razafimandimby, Cyrille Tilhac, Andreia Cathelin, Andreas Kaiser
      Pages 207-231
  4. MEMS-Based Systems

    1. Front Matter
      Pages 233-233
    2. Brian P. Otis, Nathan Pletcher, Jan Rabaey
      Pages 235-257
    3. David Ruffieux, Jérémie Chabloz, Matteo Contaldo, Christian C. Enz
      Pages 259-287
    4. Hiroyuki Ito, Hasnain Lakdawala, Ashoke Ravi
      Pages 289-311
    5. Markus Dielacher, Martin Flatscher, Thomas Herndl, Thomas Lentsch, Rainer Matischek, Josef Prainsack et al.
      Pages 313-328
  5. Back Matter
    Pages 329-330

About this book


MEMS-based Circuits and Systems for Wireless Communication provides comprehensive coverage of RF-MEMS technology from device to system level. This edited volume places emphasis on how system performance for radio frequency applications can be leveraged by Micro-Electro-Mechanical Systems (MEMS). Coverage also extends to innovative MEMS-aware radio architectures that push the potential of MEMS technology further ahead. 

This work presents a broad overview of the technology from MEMS devices (mainly BAW and Si MEMS resonators) to basic circuits, such as oscillators and filters, and finally complete systems such as ultra-low-power MEMS-based radios. Contributions from leading experts around the world are organized in three parts. Part I introduces RF-MEMS technology, devices and modeling and includes a prospective outlook on ongoing developments towards Nano-Electro-Mechanical Systems (NEMS) and phononic crystals. Device properties and models are presented in a circuit oriented perspective. Part II focusses on design of electronic circuits incorporating MEMS. Circuit design techniques specific to MEMS resonators are applied to oscillators and active filters. In Part III contributors discuss how MEMS can advantageously be used in radios to increase their miniaturization and reduce their power consumption. RF systems built around MEMS components such as MEMS-based frequency synthesis including all-digital PLLs, ultra-low power MEMS-based communication systems and a MEMS-based automotive wireless sensor node are described.


BiCMOS Bulk Acoustic Wave (BAW) resonators CMOS Low power communication devices MEMS MEMS-based circuits NEMS RF and analog circuits Silicon resonators

Editors and affiliations

  • Christian C Enz
    • 1
  • Andreas Kaiser
    • 2
  1. 1.CSEM SANeuchâtelSwitzerland
  2. 2.IEMN, Département ISENLilleFrance

Bibliographic information

  • DOI
  • Copyright Information Springer Science+Business Media New York 2013
  • Publisher Name Springer, Boston, MA
  • eBook Packages Engineering Engineering (R0)
  • Print ISBN 978-1-4419-8797-6
  • Online ISBN 978-1-4419-8798-3
  • Series Print ISSN 1558-9412
  • Buy this book on publisher's site