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Micro-opto-electro-mechanical angular velocity transducer based on the optical tunneling effect

  • Nanotechnologies in Optics and Electronics
  • Published:
Optoelectronics, Instrumentation and Data Processing Aims and scope

Abstract

The possibility of designing a micro-opto-electro-mechanical (MOEM) angular velocity transducer based on the optical tunneling effect is discussed. A MOEM transducer model has been developed. Dependences of the output optical power and output voltage on angular velocity have been obtained. The effective measurement range of angular velocities that provides quasilinearity of the transfer function has been determined. The effects of the design parameters of the sensitive element and temperature on the performance of the transducer are analyzed.

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Authors and Affiliations

  1. Moscow Aviation Institute, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993, Russia

    V. I. Busurin & A. T. Pham

Authors
  1. V. I. Busurin
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  2. A. T. Pham
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Corresponding author

Correspondence to V. I. Busurin.

Additional information

Original Russian Text © V.I. Busurin, A.T. Pham, 2016, published in Avtometriya, 2016, Vol. 52, No. 2, pp. 124–130.

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Busurin, V.I., Pham, A.T. Micro-opto-electro-mechanical angular velocity transducer based on the optical tunneling effect. Optoelectron.Instrument.Proc. 52, 210–215 (2016). https://doi.org/10.3103/S8756699016020151

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  • DOI: https://doi.org/10.3103/S8756699016020151

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