Methods for expanding the measurement range of micro-opto-electro-mechanical (MOEM) angular velocity transducer based on the optical tunneling effect and an algorithm for forming output optical signals are developed. An approximating function of the dependence of the output pulse duration of the MOEM transducer on angular velocity is determined.
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Translated from Izmeritel’naya Tekhnika, No. 6, pp. 28–32, June, 2017.
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Busurin, V.I., Zheglov, M.A., Korobkov, V.V. et al. Methods of Expanding the Measurement Range of Micro-Opto-Electro-Mechanical Angular Velocity Transducer. Meas Tech 60, 558–564 (2017). https://doi.org/10.1007/s11018-017-1234-z
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DOI: https://doi.org/10.1007/s11018-017-1234-z