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Three-Axis Micro-Opto-Electro-Mechanical Angular Velocity Transducer Based on the Optical Tunneling Effect

  • Modeling in Physical and Technical Research
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Optoelectronics, Instrumentation and Data Processing Aims and scope

Abstract

A three-axis micro-opto-electro-mechanical (MOEM) angular velocity transducer model based on the optical tunneling effect was developed. The transfer function was determined, and the effect of destabilizing factors on the characteristics of the three-axis MOEM angular velocity transducer was evaluated. The dynamic range of the MOEM transducer based on the optical tunneling effect was calculated.

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References

  1. Fiber-Optic Technology: Current Status and New Perspectives, Ed. by S. A. Dmitriev and N. N. Slepov (Tekhnosfera, Moscow, 2010) [in Russian].

  2. E. G. Kostsov, “Status and Prospects of Micro- and Nanoelectromechanics,” Avtometriya 45, (3), 3–52 (2009) [Optoelectron., Instrum. Data Process. 45, (3), 189–226 (2009)].

    Google Scholar 

  3. Sensors: a Reference Book, Ed. by V. M. Sharapov and E. S. Polishchuk (Tekhnosfera, Moscow, 2012) [in Russian].

  4. C. Y. Chi and T. L. Chen, “Compensation of Imperfections for Vibratory Gyroscope Systems Using State Observers,” Sensors and Transducers J. 6, Special Is. 128–145 (2009).

    Google Scholar 

  5. G. B. Hocker, “Fiber-Optic Sensing of Pressure and Temperature,” Appl. Opt. 18 (9), 1445–1448 (1979).

    Article  ADS  Google Scholar 

  6. J. Fraden, Handbook of Modern Sensors: Physics, Designs and Applications (Springer-Verlag, New York, 2010).

    Book  Google Scholar 

  7. V. I. Busurin and A. T. Pham, “Micro-Opto-Electro-Mechanical Angular Velocity Transducer Based on the Optical Tunneling Effect,” Avtometriya 52, (2), 124–130 (2016) [Optoelectron., Instrum. Data Process. 52, (2), 210–215 (2016)].

    Google Scholar 

  8. V. I. Busurin, A. T. Pham, V. V. Korobkov, and M. A. Zheglov, “Three-Axis Micro-Opto-Electromechanical Sensor of Angular Velocity and Linear Acceleration,” RF Pat. 2607731, Publ. 01.10.2017, Byull. No. 1.

    Google Scholar 

  9. V. L. Biderman, Applied Theory of Mechanical Vibrations (Vyssh. Shk., Moscow, 1972) [in Russian].

    Google Scholar 

  10. V. I. Busurin, B. G. Gorshkov, and V. V. Korobkov, Fiber-Optic Information-Measuring Systems (Izd. MAI, Moscow, 2012) [in Russian].

    Google Scholar 

  11. M. Born and E. Wolf, Principles of Optics (Pergamon Press, 1980; Nauka, Moscow, 1983).

    Google Scholar 

  12. V. Ya. Raspopov, Micromechanical Devices (Mashinostroenie, Moscow, 2007) [in Russian].

    Google Scholar 

  13. X. Dunzhu, Y. Cheng, and K. Lun, “The Development of Micro-Machined Gyroscope Structure and Circuitry Technology,” Sensors. 14 (1), 1394–1473 (2014).

    Article  Google Scholar 

  14. A. R. Novoselov, “Development of Highly Efficient Mosaic Photodetectors Based on Arrays of Photosensitive Elements,” Avtometriya 46 (6), 106–115 (2010) [Optoelectron., Instrum. Data Process 46 (6), 593–600 (2010)].

    Google Scholar 

  15. H. H. William, “Measurement of Low Level Photodiode Noise Currents,” Appl. Opt. 13 (10), 2209–2210 (1974).

    Article  Google Scholar 

  16. E. Udd, Fiber-Optical Sensors (John Wiley and Sons, New York, 1991; Tekhnosfera, Moscow, 2008).

    Google Scholar 

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Authors and Affiliations

  1. Moscow Aviation Institute, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993, Russia

    V. I. Busurin, A. T. Fam & V. M. Medvedev

  2. State Scientific Research Institute of Instrument Making, pr. Mira 125, Moscow, 129226, Russia

    M. A. Zheglov & V. M. Medvedev

Authors
  1. V. I. Busurin
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  2. A. T. Fam
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  3. M. A. Zheglov
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  4. V. M. Medvedev
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Corresponding author

Correspondence to V. I. Busurin.

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Busurin, V.I., Fam, A.T., Zheglov, M.A. et al. Three-Axis Micro-Opto-Electro-Mechanical Angular Velocity Transducer Based on the Optical Tunneling Effect. Optoelectron.Instrument.Proc. 53, 562–569 (2017). https://doi.org/10.3103/S8756699017060048

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  • DOI: https://doi.org/10.3103/S8756699017060048

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