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Chemical Vapor Deposition of Copper for Multilevel Metallization

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Authors
  1. Alain E. Kaloyeros
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  2. Michael A. Fury
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Kaloyeros, A.E., Fury, M.A. Chemical Vapor Deposition of Copper for Multilevel Metallization. MRS Bulletin 18, 22–29 (1993). https://doi.org/10.1557/S0883769400047291

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