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Selective and low temperature synthesis of polycrystalline diamond

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An Erratum to this article was published on 01 September 1991

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Abstract

Polycrystalline diamond thin films have been deposited on single crystal silicon substrates at low temperatures (⋚ 600 °C) using a mixture of hydrogen and methane gases by high pressure microwave plasma-assisted chemical vapor deposition. Low temperature deposition has been achieved by cooling the substrate holder with nitrogen gas. For deposition at reduced substrate temperature, it has been found that nucleation of diamond will not occur unless the methane/hydrogen ratio is increased significantly from its value at higher substrate temperature. Selective deposition of polycrystalline diamond thin films has been achieved at 600 °C. Decrease in the diamond particle size and growth rate and an increase in surface smoothness have been observed with decreasing substrate temperature during the growth of thin films. As-deposited films are identified by Raman spectroscopy, and the morphology is analyzed by scanning electron microscopy.

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References

  1. J. L. Davidson, R. Ramesham, and C. Ellis, J. Electrochem. Soc. 137, 3206 (1990).

    Article  CAS  Google Scholar 

  2. H. Kaneko, M. Kamada, R. Kuwae, A. Sawabe, and T. Inuzuka, Appl. Surf. Sci. 33/34, 546 (1988).

    Article  Google Scholar 

  3. Y. Saito, K. Sato, H. Tanaka, K. Fujita, and S. Matuda, J. Mater. Sci. 23, 842 (1988).

    Article  CAS  Google Scholar 

  4. M.J. Pinneo, S. Yokoto, and K.V. Ravi, “The low temperature deposition of diamond on gallium arsenide,” Third Annual SDIO/IST-ONR Diamond Technology Initiative Symposium, Crystal City, VA, Paper #T4 (1988).

  5. M. Kitabatake and K. Wasa, J. Appl. Phys. 58, 1693 (1985).

  6. A. H. Deutchman, R. J. Partyka, and J. C. Lewis, Fourth Annual SDIO/IST-ONR Diamond Technology Initiative Symposium, Crystal City, VA, Paper #T3 (1989).

  7. C. Deshpandey, R.F. Bunshah, H.J. Doerr, and M.C. Radhakrishna, “Low temperature deposition of smooth transparent diamond films,” Fourth Annual SDIO/IST-ONR Diamond Technology Initiative Symposium, Crystal City, VA, Paper #T4 (1989).

  8. Y. Liou, A. Inspektor, R. Weimer, and R. Messier, Appl. Phys. Lett. 55, 631 (1989).

  9. T. P. Ong and R. P. H. Chang, Appl. Phys. Lett. 55, 2063 (1989).

  10. W.L. Hsu, E.A. Fuchs, and K.F. McCarty, “Diamond growth at low substrate temperatures,” Fourth Annual SDIO/IST-ONR Diamond Technology Initiative Symposium, Crystal City, VA, Paper #THP12a (1989).

  11. W. L. Hsu, D. M. Tung, E. A. Fuchs, K. F. McCarty, A. Joshi, and R. Nimmagadda, Appl. Phys. Lett. 55, 2739 (1989).

  12. J. L. Davidson, R. Ramesham, and C. Ellis, “Selective deposition of diamond films,” Fourth Annual SDIO/IST-ONR Diamond Technology Initiative Symposium, Crystal City, VA, Paper #TP3 (1989).

  13. J. L. Davidson, C. Ellis, and R. Ramesham, J. Electron. Mater. 18, 711 (1989).

    Article  CAS  Google Scholar 

  14. D. S. Knight and W. B. White, J. Mater. Res. 4, 385 (1989).

    Article  CAS  Google Scholar 

  15. L. S. Plano and F. Adar, “Raman spectroscopy of polycrystalline diamond films,” Proc. S.P.I.E.- The International Society for Optical Engineering, International Conference on Raman and Luminescence Spectroscopy in Technology 822, 52 (1987).

    CAS  Google Scholar 

  16. R. Ramesham, T. Roppel, B.F. Hajek, and C. Ellis, J. Electrochem. Soc. 137, 3203 (1990).

    Article  CAS  Google Scholar 

  17. S. P. Chauhan, J. C. Angus, and N. C. Gardner, J. Appl. Phys. 47, 4746 (1976).

    Article  CAS  Google Scholar 

  18. B. V. Deryagin and D. V. Fedoseev, Growth of Diamond and Graphite from the Gas Phase (Izd. Nauka, Moscow, USSR, 1977), Chap. 4.

  19. R. Ramesham, C. Ellis, T. Roppel, D. A. Jaworske, and W. Baugh, in Plasma Processing and Synthesis of Materials III, edited by D. Apelian and J. Szekely (Mater. Res. Soc. Symp. Proc. 190, Pittsburgh, PA, 1990).

    Google Scholar 

  20. R. Ramesham, C. Ellis, and T. Roppel, “Low temperature selective deposition of diamond thin films,” Third International Conference on Amorphous and Crystalline Silicon Carbide, edited by G.L. Harris (ICACSC’90), Howard University, Washington, DC, Abstract #V.4, April 12–13 (1990).

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Authors and Affiliations

  1. Electrical Engineering Department, Alabama Microelectronics Science and Technology Center, Auburn University, Auburn, Alabama, 36849-5201, USA

    R. Ramesham, T. Roppel, C. Ellis & W. Baugh

  2. Lewis Research Center, National Aeronautics and Space Administration, Cleveland, Ohio, 44135-3127, USA

    D. A. Jaworske

Authors
  1. R. Ramesham
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  2. T. Roppel
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  3. C. Ellis
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  4. D. A. Jaworske
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  5. W. Baugh
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Ramesham, R., Roppel, T., Ellis, C. et al. Selective and low temperature synthesis of polycrystalline diamond. Journal of Materials Research 6, 1278–1286 (1991). https://doi.org/10.1557/JMR.1991.1278

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  • DOI: https://doi.org/10.1557/JMR.1991.1278

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