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Excimer laser-induced sputtering of YBa2Cu3O7−x

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Abstract

Excimer laser-induced sputtering of YBa2Cu3O7−x targets has been investigated. Two aspects of this process are reported here: the spectral content of the emission and sputtering of the target. Postsputtering analysis of the sputtered area of the target shows a nonstoichiometric composition: rich in Cu but depleted of Ba and Y.

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Authors and Affiliations

  1. Department of Applied Physics and Electrical Engineering, Oregon Graduate Center, 19600 N. W. Von Neumann Drive, Beaverton, 97006-1999, Oregon, USA

    U. Sudarsan, N. W. Cody, M. J. Bozack & R. Solanki

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  1. U. Sudarsan
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  2. N. W. Cody
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  3. M. J. Bozack
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  4. R. Solanki
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Sudarsan, U., Cody, N.W., Bozack, M.J. et al. Excimer laser-induced sputtering of YBa2Cu3O7−x. Journal of Materials Research 3, 825–829 (1988). https://doi.org/10.1557/JMR.1988.0825

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  • DOI: https://doi.org/10.1557/JMR.1988.0825

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