Abstract
Nanostructured titanium oxide films were fabricated by vacuum-plasma spraying. The microstructure of the films was characterized with SEM, TEM, and XRD. The chemical state of the titanium oxide of the films was analyzed using XPS. The results indicated that the vacuum-plasma sprayed nanostructured titanium oxide films possessed a corallike structure with small pores and agglomerated grains, which was composed of nanosized particles. The main phases of the films were anatase and rutile, and their relative content was determined by the plasma parameters. Low-valence titanium cations were also found in the films.
Similar content being viewed by others
References
G. Yang, H. Zhuang, and P. Biswas. Characterization and Sinterability of Nanophase Titania Particles Processed in Flame Reactors, Nanostructured Mater., Vol 7 (No. 6), 1996, p 676–689
T. Takagahara, Effects of Dielectric Confinement and Electron-Hole Exchange Interaction on Excitonic States in Semiconductor, Phys. Rev. B, Condens. Matter, Vol 47 (No. 47), 1993, p 4569–4584
A. Hagfeldt, N. Vlachopoulos, and M. Grätzel, Fast Electrochromic Switching with Nanocrystalline Oxide Semiconductor Films, J. Electrochem. Soc., Vol 141 (No. 7), 1994, p L82-L84
E. Haro-Poniatowski, R. Rodriguez-Talavera, M. De La Cruz Hevedia, O. Cano-Corona, and R. Anoyo-Murillo, Crystallization of Nanosized Titania Particles Prepared by the Sol-Gel Process, J. Mater. Res., Vol 9, 1994, p 2102–2108
J. Lu, J. Wang, and R. Rai, Solution Precursor Chemical Vapor Deposition of Titanium Oxide Thin Films, Thin Solid Films, Vol 204, 1991, p L13-L17
M.H. Suhail, G.M. Rao, and S. Mohan, Dc Reactive Magnetron Sputtering of Titanium-Structural and Optical Characterization of TiO2 Films, J. Appl. Phys., Vol 71 (No. 3), 1992, p 1421–1427
H. Li, W. Luo, X. Chen, A. Ding, and Z. Zhuang, Preparation of Nanocrystalline PLT Thin Films by RF Magnetron Sputtering, J. Inorg. Mater., Vol 9 (No. 3), 1994, p 371–374
M. Shirkhanzadeh, Fabrication and Characterization of Alkoxy-Derived Nanophase TiO2 Coatings, Nanostructured Mater., Vol 5 (No. 1), 1995, p 33–40
J. Karthikeyan, C.C. Berndt, J. Tikkanen, J.Y. Wang, A.H. King, and H. Herman, Preparation of Nanophase Materials by Thermal Spray Processing of Liquid Precursors, Nanostructured Mater., Vol 9, 1997, p 137–140
V.L. Tellkamp, M.L. Lau, A. Fabel, and E.J. Lavernia, Thermal Spraying of Nanocrystalline Inconel 178, Nanostructured Mater., Vol 9, 1997, p 489–492
C.C. Berndt and E.J. Lavernia, Thermal Spray Processing of Nanoscale Materials, J. Therm. Spray Technol., Vol 7 (No. 3), 1998, p 411–440
V. Sukharev, A. Wold, Y.M. Gao, and K. Dwight, Photoassisted Decomposition of Salicylic Acid on TiO2 and Pd/TiO2 Films, J. Solid State Chem., Vol 119, 1995, p 339–343
L.D. Birkefeld, A.M. Azad, and S.A. Akbar, Carbon Monoxide and Hydrogen Detection by Anatase Modification of Titanium Dioxide, J. Am. Ceram. Soc., 1992, p 75, 2964
B. O’Regan and M. Grätzel, A Low-Cost, High-Efficiency Solar Cell Based on Dye-Sensitized Colloidal TiO2 Films, Nature, Vol 353, 1991, p 737–739
J.H. Huang, L. Gao, J.Y. Chen, and D.S. Yan, Controlling Crystallinity of Nano-Titania Powder Prepared by the Hydrolysis of Titanium Alkoxide, J. Inorg. Mater., Vol 11 (No. 1), 1996, p 51–56
Powder Diffraction File, set 21 to 22, Inorganic Volume, No. PDIS-22IRB, JCPDS International Center for Diffraction Data, 1983
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Zhu, Y., Huang, M., Huang, J. et al. Vacuum-plasma sprayed nanostructured titanium oxide films. J Therm Spray Tech 8, 219–222 (1999). https://doi.org/10.1361/105996399770350430
Received:
Revised:
Issue Date:
DOI: https://doi.org/10.1361/105996399770350430