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Synthesis and Sensor Characteristics of Nanoscale Thin Films in the In2O3–SnO2 and Y2O3–TbOx(CeOx) Systems

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Inorganic Materials: Applied Research Aims and scope

Abstract

(In2O3)0.95(SnO2)0.05, (TbOх)0.50(Y2O3)0.50, and (CeO2)0.80(Y2O3)0.20 single-phase cubic solid solution xerogels and nanocrystalline powders have been synthesized via coprecipitation of hydroxides. Using these powders as precursors, nanoscale film electroconductive materials on a corundum substrate have been produced by screen printing. The highest speed of sensor response to ozone is attributed to In0.95Sn0.05O1.5 films, reaching 8–10 s at a temperature of 473 K. (TbOх)0.50(Y2O3)0.50 thin film is found to be sensitive to changes in the concentrations of (CO + CO2) (the sensitivity coefficient S = 25.11) and ozone (S = 3.16–7.94). (CeO2)0.80(Y2O3)0.20 film exhibits a sensor response to (CO + CO2) (S = 3.10). This study opens up the prospects of using the obtained nanopowders and relevant thin films as materials for resistive gas sensors operating at oxygen pressures of 103–104 Pa.

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Authors and Affiliations

  1. Grebenshchikov Institute of Silicate Chemistry, Russian Academy of Sciences, 199155, St. Petersburg, Russia

    M. Yu. Arsent’ev, M. V. Kalinina, N. Yu. Koval’ko, T. L. Simonenko, L. V. Morozova, P. A. Tikhonov & O. A. Shilova

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  1. M. Yu. Arsent’ev
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  2. M. V. Kalinina
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  3. N. Yu. Koval’ko
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  4. T. L. Simonenko
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  5. L. V. Morozova
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  6. P. A. Tikhonov
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  7. O. A. Shilova
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Correspondence to P. A. Tikhonov.

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Translated by O. Maslova

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Arsent’ev, M.Y., Kalinina, M.V., Koval’ko, N.Y. et al. Synthesis and Sensor Characteristics of Nanoscale Thin Films in the In2O3–SnO2 and Y2O3–TbOx(CeOx) Systems. Inorg. Mater. Appl. Res. 11, 441–447 (2020). https://doi.org/10.1134/S2075113320020033

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  • DOI: https://doi.org/10.1134/S2075113320020033

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