Skip to main content
Log in

State of the art and prospects for the development of SAW-based solid-state gyros

  • Published:
Gyroscopy and Navigation Aims and scope Submit manuscript

Abstract

Modern MEMS gyros are widely used nowadays, however, the field of high-dynamic moving objects is still hardly accessible for them because of rigid requirements for the sensors to be shock-resistant. Solid-state gyros (SSG), namely, those that are based on surface acoustic waves (SAW), are likely to become the solution to this problem. This paper provides a short introduction to theory of SAW-based SSGs and a brief overview of the existing design concepts, which are described, analyzed, and compared with each other. The main advantages, problems, and prospects for further development of SAW-based SSGs are discussed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. Lao, B.Y., Gyroscopic Effect in Surface Acoustic Waves, Proc. IEEE Ultrasonics Symp., 1980, pp. 687–691.

  2. Varadan, V.K., Varadan, V.V., Suh W.D. et al., Design and Development of a MEMS-IDT Gyroscope, Smart Mater. Struct., 2000, no. 9, pp. 898–905.

  3. Varadan, V.K., Xavier, P., Varadan, V.V., and Suh, W.D., Conformal MEMS-IDT Gyroscopes and their Comparison with Fiber Optic Gyro, Proc. SPIE, 2000, vol. 8990, pp. 335–344.

    Article  Google Scholar 

  4. Varadan, V.K., Suh, W.D., Jose, K.A., and Varadan, V.V., Hybrid MEMS-IDT-Based Accelerometer and Gyroscope in a Single Chip, Proc. SPIE, 2001, 4334, 119.

  5. Suh, W.D., Jose, K.A., Xavier, P.B., Varadan, V.K., and Varadan, V.V., Design, Simulation, and Testing of IDT-Based MEMS Gyroscope, Proc. SPIE, 2001, 4334, 95.

  6. Jose, K.A., Suh, W.D., Xavier, P.B., Varadan, V.K., and Varadan, V.V., Surface Acoustic Wave MEMS Gyroscope, Wave Motion, 2002, vol.36,iss.4, pp. 367–381.

    Article  MATH  Google Scholar 

  7. Mehta, A., Jose, K.A., and Varadan, V.K., Numerical Simulation of a Surface Acoustic Wave (SAW) Gyroscope Using HP EEsof, Proc. SPIE, 2002, 4700, 169.

  8. Kurosawa, M., Fukuda, Y., Takasaki, M., and Highuchi T., A Surface Acoustic Wave Gyro, Transducers, 1997, pp. 863–866.

  9. Kurosawa, M. A Surface Acoustic-Wave Gyro Sensor, Sensors and Actuators, 1998, pp. 33–39.

  10. Woods, R.C., Kalami, H., and Johnson, B., Evaluation of a Novel Surface Acoustic Wave Gyroscope, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2002, vol. 49, no.1.

  11. Lee, S. W., Rhim, J. W., Park, S. W., and Yang, S. S., A Novel Micro Rate Sensor using a Surface-Acoustic-Wave (SAW) Delay-line Oscillator, Sensors, IEEE, 2007, pp. 1156–1159.

  12. Lee, S. W., Rhim, J. W., Park, S.W., and Yang, S.S., A Micro Rate Gyroscope based on the SAW Gyroscopic Effect, J. Micromech. Microeng., 2007, no. 17, pp. 2272–2279.

  13. Wang, W., Oh, H., Lee, K., Yoon, S., and Yang, S. Enhanced Sensitivity of Novel Surface Acoustic Wave Microelectromechanical System-Interdigital Transducer Gyroscope, JJAP, 2009, no. 48.

  14. Wang, W., He, S., and Li, H., Theoretical Sensitivity Evaluation of a Shear-Horizontal SAW based Micro Rate Sensor, Ultrasonics Symp. (IUS), 2009, pp. 1684–1687.

  15. W. Wang, F. Xu, S. He, S. Li, and Lee, K., A New Micro-Rate Sensor Based on Shear Horizontal Surface Acoustic Wave Gyroscopic Effect, JJAP, 2010, no. 49.

  16. Oh, H., W. Wang, S. Yang, and Lee, K., Development of SAW Based Gyroscope with High Shock and Thermal Stability, Sensors and Actuators A, 2011, no. 165, pp.8–15.

  17. Sarapuloff, S.A., Skripkovskii, G. A., Rhim, J. W., Inertial Effects in Surface and Bulk Elastic Waves and Possibility of their Use in High-G Solid-State Micro Gyros, Proc.12th S.-Peterb. Int. Conf. on Integr. Nav. Syst., 2005, pp. 355–361.

  18. Collet, B., Gyroscopic Effect in Surface Acoustic Waves in Anisotropic Solid Media, WCU (Paris), 2003. pp. 991–994.

  19. Farwell, G. W., Topics in Applied Physics, Ed. Oliver, A. A., Springer-Verlag, N.Y., 1978, vol. 24, pp. 13–60.

    Google Scholar 

  20. Lukyanov, D.P., Tikhonov, A.A., Filatov, Yu.V. et al., Development and Optimization of the SAW-Microaccelerometer Design, (Part 2), Giroskopiya Navigatsiya, 2008, no. 3, pp. 62–76.

  21. Lukyanov, D.P., Filatov, Yu.V., and Shevchenko, S.Yu. et al., The development and Investigation of the SAW-microaccelerometer, Proc. 11th S.-Peterb. Int. Conf. on Integr. Nav. Syst., 2004, pp. 300–306.

  22. Kalinin, V., Lavrov, Yu., Lukianov, V., Mel’nikov, V., and Shubarev, V., Mathematical Simulation of a Surface Acoustic Wave (SAW), Elektronika: Nauka, Tekhnologiya, Biznes, 2008, Spetsvypusk, pp. 47–51.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Additional information

The article is published in the original.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Lukyanov, D.P., Filatov, Y.V., Shevchenko, S.Y. et al. State of the art and prospects for the development of SAW-based solid-state gyros. Gyroscopy Navig. 2, 214–221 (2011). https://doi.org/10.1134/S2075108711040109

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S2075108711040109

Keywords

Navigation