Abstract
Structural, electrical, and gas-sensitive characteristics of thin films (~100 nm) of tin dioxide containing Sb, Au, and Ni impurities in the bulk and dispersed Au clusters on the surface were studied. For the films prepared by magnetron sputtering, the size of SnO2 grains is of the order of 40–125 nm, and introduction of Au in the synthesis step leads to the Au segregation in the form of nanosized inclusions of the second phase. The sensors are highly sensitive to H2S in a wide concentration interval, 0.5–100 ppm. Operation of the sensors in the thermo-cycling mode ensures increased response to low H2S concentrations (<5 ppm) in the cooling cycle. The values of the sensor response remained high in long-term tests (180 days and more).
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The authors are grateful to Cand. Sci. (Phys.-Math.), Associate Prof., Deputy Head of Laboratory of New Materials and Perspective Technologies of the Siberian Physicotechnical Institute, Research Tomsk State University V.A. Svetlichnyi for recording the Raman spectra and to I.A. Shulepov for estimating the film composition by Auger electron spectroscopy.
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The study was performed within the framework of the government assignment of the Ministry of Education and Science of the Russian Federation (no. 3.9661.2017/8.9).
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Maksimova, N.K., Biryukov, A.A., Sevast’yanov, E.Y. et al. Structure and Properties of Hydrogen Sulfide Sensors Based on Thin Tin Dioxide Films. Russ J Appl Chem 93, 427–436 (2020). https://doi.org/10.1134/S1070427220030155
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DOI: https://doi.org/10.1134/S1070427220030155