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Synthesis and thermal properties of aminopyrimidine Ge(II) precursors for CVD/ALD technology

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Abstract

Derivatives of aminopyrimidine had been used as ligands in various metals complexes but not as precursors for PRAM. A series of aminopyrimidine Ge(II) precursors has been synthesized for the first time. The diamine germanium (II) precursors were tested by TG and demonstrated excellent volatilization.

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Authors and Affiliations

  1. The Key Laboratory of Food Colloids and Biotechnology, Ministry of Education, School of Chemical and Material Engineering, Jiangnan University, Wuxi, China

    Quan Wang, Dawei Wang & Yuqiang Ding

  2. State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Micro-system and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China

    Sannian Song, Zhitang Song, Dawei Wang & Yuqiang Ding

Authors
  1. Quan Wang
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  2. Sannian Song
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  3. Zhitang Song
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  4. Dawei Wang
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  5. Yuqiang Ding
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Correspondence to Zhitang Song.

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The text was submitted by the authors in English.

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Wang, Q., Song, S., Song, Z. et al. Synthesis and thermal properties of aminopyrimidine Ge(II) precursors for CVD/ALD technology. Russ J Gen Chem 84, 2027–2030 (2014). https://doi.org/10.1134/S1070363214100284

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  • DOI: https://doi.org/10.1134/S1070363214100284

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