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Laser-induced modification of porous silicon

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Abstract

We present the results of experiments on annealing the surface layer of porous silicon by pulsed IR laser radiation. The character of laser-induced modification has been studied using IR spectroscopy and transmission electron microscopy. It is shown that the proposed method can be used to obtain a Si:SiO2 composite.

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References

  1. A. I. Gusev and A. A. Rempel, Nanocrystalline Materials (Fizmatlit, Moscow, 2001; Cambridge International Science Publ., Cambridge, 2004).

    Google Scholar 

  2. E. F. Venger, R. Yu. Golipei, and L. O. Matveeva, Optoelektron. Poluprovodn. Tekh. 36, 199 (2001).

    Google Scholar 

  3. B. Das and S. P. McGinnis, Semicond Sci. Technol. 14, 998 (1999).

    Article  ADS  Google Scholar 

  4. L. A. Balagurov, S. C. Bauliss, A. F. Orlov, et al., in Proceedings of the International Conference on Porous Semiconductors: Science and Technology, Madrid, 2000, p. 53.

  5. A. G. Gullis, L. T. Ganam, and P. D. J. Calcott, J. Appl. Phys. 82, 909 (1997).

    Article  ADS  Google Scholar 

  6. V. I. Sokolov, L. M. Sorokin, A. E. Kalmykov, et al., Fiz. Tverd. Tela (St. Petersburg) 47, 1316 (2005) [Phys. Solid State 47, 1365 (2005)].

    Google Scholar 

  7. G. A. Abil’siitov, V. G. Gontar, A. A. Kolpakov, et al., Processing Lasers: A Handbook, Ed. by G. A. Abil’siitov (Mashinostroenie, Moscow, 1991), Vol. 2, p. 544 [in Russian].

    Google Scholar 

  8. Z. I. Alferov, Yu. V. Koval’chuk, Yu. V. Pogorel’skiĭ, et al., Izv. Akad. Nauk SSSR, Ser. Fiz. 49, 1069 (1985).

    Google Scholar 

  9. L. Pascual, R. J. Martyn-Palma, and J. M. Martynez-Duart, Appl. Phys. Lett. 87, 251 921 (2005).

    Google Scholar 

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Authors and Affiliations

  1. Ioffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg, 194021, Russia

    L. M. Sorokin, V. I. Sokolov, A. P. Burtsev & A. E. Kalmykov

  2. Fock Institute of Physics, St. Petersburg State University, St. Petersburg, 198504, Russia

    L. V. Grigor’ev

Authors
  1. L. M. Sorokin
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  2. V. I. Sokolov
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  3. A. P. Burtsev
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  4. A. E. Kalmykov
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  5. L. V. Grigor’ev
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Corresponding author

Correspondence to A. E. Kalmykov.

Additional information

Original Russian Text © L.M. Sorokin, V.I. Sokolov, A.P. Burtsev, A.E. Kalmykov, L.V. Grigor’ev, 2007, published in Pis’ma v Zhurnal Tekhnicheskoĭ Fiziki, 2007, Vol. 33, No. 24, pp. 69–75.

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Sorokin, L.M., Sokolov, V.I., Burtsev, A.P. et al. Laser-induced modification of porous silicon. Tech. Phys. Lett. 33, 1065–1068 (2007). https://doi.org/10.1134/S1063785007120231

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  • DOI: https://doi.org/10.1134/S1063785007120231

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