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Raman spectra observation of silver nanoparticles in porous silicon fabricated by ion implantation

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Abstract

Porous silicon layers fabricated by the low-energy high-dose Ag+-ion implantation of crystalline silicon with doses from 7.5 × 1016 to 1.5 × 1017 ion/cm2 are studied by Raman spectroscopy. Pores with sizes from ∼100–180 nm formed on irradiated silicon surface are controlled by scanning electron microcopy. Synthesized silver nanoparticles are observed in the structure of porous silicon. The sizes of pour and nanoparticles are increased with an increase in implantation dose. Acoustic vibrations generated by laser irradiation in silver nanoparticles of various sizes are registered by low-temperature Raman spectra of composite material.

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Authors and Affiliations

  1. Federal State Institution of Science, Zavoiskii Physical-Technical Institute, Russian Academy of Sciences, ul. Sibirskii trakt 10/7, Kazan, 420029, Russia

    N. V. Kurbatova, M. F. Galyautdinov, V. I. Nuzhdin, V. F. Valeev & A. L. Stepanov

  2. Kazan Federal University, ul. Kremlevskaya 18, Kazan, 420018, Russia

    Yu. N. Osin & A. L. Stepanov

  3. Kazan National Research Technological University, ul. K. Marksa 68, Kazan, 420015, Russia

    A. L. Stepanov

Authors
  1. N. V. Kurbatova
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  2. M. F. Galyautdinov
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  3. V. I. Nuzhdin
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  4. V. F. Valeev
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  5. Yu. N. Osin
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  6. A. L. Stepanov
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Correspondence to A. L. Stepanov.

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Kurbatova, N.V., Galyautdinov, M.F., Nuzhdin, V.I. et al. Raman spectra observation of silver nanoparticles in porous silicon fabricated by ion implantation. Nanotechnol Russia 10, 231–234 (2015). https://doi.org/10.1134/S1995078015020160

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  • DOI: https://doi.org/10.1134/S1995078015020160

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