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Capacitor structures based on strontium titanate films

  • Proceedings of the XIX All-Russian Conference on Physics of Ferroelectrics (VKS-XIX)
  • Moscow, Russia, June 19–23, 2011
  • Published:
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Abstract

The structural properties of strontium titanate films and the electrical parameters of the related capacitor structures have been investigated. It has been found that the deposition temperature exerts a direct effect on the phase composition of the films, the degree of perfection of the crystal structure, and the internal stresses in the lattice. The strontium titanate films deposited at a temperature of 800°C are single-phase, have a rather perfect crystal structure, and possess minimum internal stresses. It has been shown that the capacitor structures based on oriented strontium titanate films provide a twofold decrease in the level of dielectric loss as compared to similar structures based on barium strontium titanate solid solution films at a frequency of 1.5 GHz.

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Authors and Affiliations

  1. St. Petersburg Electrotechnical University “LETI,”, ul. Professora Popova 5, St. Petersburg, 197376, Russia

    A. V. Tumarkin, M. M. Gaidukov, S. V. Razumov & A. G. Gagarin

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  1. A. V. Tumarkin
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  2. M. M. Gaidukov
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  3. S. V. Razumov
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  4. A. G. Gagarin
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Correspondence to A. V. Tumarkin.

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Original Russian Text © A.V. Tumarkin, M.M. Gaidukov, S.V. Razumov, A.G. Gagarin, 2012, published in Fizika Tverdogo Tela, 2012, Vol. 54, No. 5, pp. 911–914.

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Tumarkin, A.V., Gaidukov, M.M., Razumov, S.V. et al. Capacitor structures based on strontium titanate films. Phys. Solid State 54, 968–971 (2012). https://doi.org/10.1134/S1063783412050435

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  • DOI: https://doi.org/10.1134/S1063783412050435

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