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Synthesis of Silicon-Carbide Nanoparticles by the Laser Pyrolysis of a Mixture of Monosilane and Acetylene

  • MICROCRYSTALLINE, NANOCRYSTALLINE, POROUS, AND COMPOSITE SEMICONDUCTORS
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Abstract

The conditions of the laser-stimulated synthesis reaction of silicon-carbide nanoparticles are determined and their characterization is performed. The laser synthesis reaction of SiC particles in the gas phase is observed with the SiH4/C2H2 flow ratio in the range of 1.6–3.2. The temperature in the reaction-zone region is ~1400–1500°C. Silicon-carbide nanoparticles ~6 nm in diameter are fabricated and their composition is investigated.

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Funding

This work was supported by the Program of the Presidium of the Russian Academy of Sciences 1.7R and by the Russian Foundation for Basic Research, project no. 18-02-00786.

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Authors and Affiliations

  1. Prokhorov General Physics Institute, Russian Academy of Sciences, 119991, Moscow, Russia

    I. A. Ershov, L. D. Iskhakova, V. I. Krasovskii, F. O. Milovich, S. I. Rasmagin & V. I. Pustovoi

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  1. I. A. Ershov
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  2. L. D. Iskhakova
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  3. V. I. Krasovskii
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  4. F. O. Milovich
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  5. S. I. Rasmagin
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  6. V. I. Pustovoi
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Correspondence to S. I. Rasmagin.

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Translated by N. Korovin

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Ershov, I.A., Iskhakova, L.D., Krasovskii, V.I. et al. Synthesis of Silicon-Carbide Nanoparticles by the Laser Pyrolysis of a Mixture of Monosilane and Acetylene. Semiconductors 54, 1467–1471 (2020). https://doi.org/10.1134/S1063782620110081

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  • DOI: https://doi.org/10.1134/S1063782620110081

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