Abstract
On the basis of data on X-ray structural analysis performed by the method of reciprocal-space mapping and investigations using secondary-ion mass spectrometry and transmission electron microscopy, it is shown that vertical compressive stresses also arise in a multilayer epitaxial heterostructure comprised of a step-graded metamorphic buffer along with lateral compressive stresses. The cause of the appearance of vertical stresses is the effect of interlayer hardening, which arises due to the deceleration of fragments of glide dislocations by interphase boundaries. Analysis performed within the framework of the linear theory of elasticity shows that the elastically stressed state of the buffer steps is similar to the state that can be achieved as a result of a two-stage deformation process: bulk and biaxial compression. Bulk compression leads to large energy expenditures in the formation of the structure of the buffer steps, which is reflected, in particular, in violation of the coherence between the dislocation-free and the underlying layers.
Similar content being viewed by others
REFERENCES
T. Kujofsa and J. E. Ayers, Int. J. High Speed Electron. Syst. 24, 1520009 (2015).
A. S. Bugaev, G. B. Galiev, P. P. Mal’tsev, S. S. Pushkarev, and Yu. V. Fedorov, Nano- Mikrosist. Tekh., No. 10 (147), 14 (2012).
D. J. Dunstan, Philos. Mag. A 73, 1323 (1996).
J. Tersoff, Appl. Phys. Lett. 62, 693 (1993).
R. Beanland, D. J. Dunstan, and P. J. Goodhew, Adv. Phys. 45, 87 (1996).
D. J. Dunstan, P. Kidd, L. K. Howard, and R. H. Dixon, Appl. Phys. Lett. 59, 3390 (1991).
D. J. Dunstan, P. Kidd, P. E. Fewster, N. L. Andrew, R. Grey, J. P. R. David, L. Gonzalez, Y. Gonzalez, A. Sacedon, and F. Gonzalez-Sanz, Appl. Phys. Lett. 65, 839 (1994).
B. W. Dodson, J. Appl. Phys. 53, 37 (1988).
F. Romanato, E. Napolitani, A. Carnera, A. V. Drigo, L. Lazzarini, G. Salviati, C. Ferrari, A. Bosacchi, and S. Franchi, J. Appl. Phys. 86, 4748 (1999).
D. Gonzalez, D. Araujo, G. Aragon, and R. Garcia, Appl. Phys. Lett. 71, 3099 (1997).
L. B. Freund, J. C. Ramirez, and A. F. Bower, Mater. Res. Soc. Symp. Proc. 160, 47 (1990).
A. V. Nokhrin, V. N. Chuvil’deev, V. I. Kopylov, Yu. G. Lopatin, O. E. Pirozhnikova, N. V. Sakharov, A. V. Piskunov, and N. A. Kozlova, Vestn. Nizhegor. Univ. im. N. I. Lobachevskogo, No. 5 (2), 142 (2010).
A. I. Gusev, Phys. Usp. 41, 49 (1998).
J. E. Ayers, Heteroepitaxy of Semiconductors. Theory, Growth, and Characterization (Taylor and Francis Group, Roca Raton, London, New York, 2007), Chap. 5, p. 164.
J. E. Ayers, S. K. Ghandhi, and L. J. Schowalter, J. Cryst. Growth 113, 430 (1991).
A. H. Aleshin, A. S. Bugaev, M. A. Ermakova, and O. A. Ruban, Semiconductors 49, 1039 (2015).
G. Feuillet and D. Cherns, Mater. Sci. Forum 10–12, 803 (1986).
A. N. Aleshin, A. S. Bugaev, M. A. Ermakova, and O. A. Ruban, Crystallogr. Rep. 61, 299 (2016).
D. J. Dunstan, P. Kidd, R. Beanland, A. Sacedon, E. Calleja, L. Gonzalez, Y. Gonzalez, and F. J. Pacheco, Mater. Sci. Technol. 12, 181 (1996).
K. N. Tu, J. W. Mayer, and L. C. Feldman, Electronic Thin Film Science. For Electrical Engineers and Materials Scientists (Macmillan, New York, 1992), Appendix E, p. 411.
C. C. Strel’chenko and V. V. Lebedev, A3B5 Compounds, The Handbook (Metallurgiya, Moscow, 1984), p. 50 [in Russian].
J. E. Ayers, Heteroepitaxy of Semiconductors. Theory, Growth, and Characterization (Taylor and Francis Group, Roca Raton, London, New York, 2007), Chap. 2, p. 30.
L. D. Landau and E. M. Lifshitz, Course of Theoretical Physics, Vol. 7: Theory of Elasticity (Fizmatlit, Moscow, 2003; Pergamon, New York, 1986), Chap. 1, p. 58.
Yu. P. Khapachev and F. N. Chukhovskii, Sov. Phys. Crystallogr. 34, 465 (1989).
A. Ballato, IEEE Trans. Ultrason., Ferroelectr., Freq. Control 43, 56 (1996).
V. E. Ankudinov, D. D. Aflyatunova, M. D. Krivilev, and G. A. Gordeev, Computer Simulation of the Transfer and Deformation Processes in Continuous Media, The School-Book (Udmurts. Univ., Izhevsk, 2014) [in Russian].
Funding
The work was performed as part of the State Task for 2019 no. 075-00816-19-00 of December 27, 2018, for the Institute of Ultrahigh Frequency Semiconductor Electronics, Russian Academy of Sciences.
Author information
Authors and Affiliations
Corresponding author
Ethics declarations
The authors declare they have no conflict of interests.
Additional information
Translated by V. Bukhanov
Rights and permissions
About this article
Cite this article
Aleshin, A.N., Bugaev, A.S., Ruban, O.A. et al. Energy Expenditure Upon the Formation of the Elastically Stressed State in the Layers of a Step-Graded Metamorphic Buffer in a Heterostructure Grown on a (001) GaAs Substrate. Semiconductors 53, 1066–1074 (2019). https://doi.org/10.1134/S1063782619080025
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063782619080025