Abstract
The temperature dependence of the contact resistivity ρ c (T) of Au-Ti-Al-Ti-n +-GaN ohmic contacts is studied experimentally and substantiated theoretically in the temperature range T = 4.2–300 K. It is shown that the saturation portion of ρ c (T) is observed in the low-temperature measurement region (4.2–50 K). As the temperature increases, ρ c decreases by the exponential law. The experimental and calculated dependences ρ c (T) are in agreement. The obtained results make it possible to conclude the field nature of the current transfer for the saturation region of ρ c (T) and the thermal-field one, for the exponential region.
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References
Ohmic Contacts to Semiconductor, Ed. by B. Schwartz (Electrochem Soc., New York, 1969).
T. V. Blank and Yu. A. Gol’dberg, Semiconductors 41, 1263 (2007).
R. Quay, Gallium Nitride Electronics (Springer, Berlin, Heidelberg, 2008).
A. G. Vasil’ev, Yu. V. Kolkovskii, and Yu. A. Kontsevoi, Microwave Wide-Gap Semiconductor Devices and Facilities (Tekhnosfera, Moscow, 2011) [in Russian].
M. G. Mil’vidskii and V. B. Osvenskii, Structural Defects in Epitaxial Layers of Semiconductors (Metallurgiya, Moscow, 1985) [in Russian].
A. N. Kovalev, Semiconductor Heterostructure Transistors (Mosk. Inst. Stali Splavov, Moscow, 2011) [in Russian].
K. L. Ernisherlova, A. V. Lyuttsau, L. F. Seidman, E. M. Temper, A. M. Konovalov, and V. V. Pishchagin, in Proceedings of the 9th All-Russia Conference on Nitrides of Hallium, Indium, Aluminium: Structures and Devices (Moscow, St.-Petersburg, 2013), p. 273.
W. Knap, S. Contreras, H. Alause, S. Skierbiszewski, J. Camassel, M. Dyakonov, J. L. Robert, J. Yang, Q. Chen, M. Asif Khan, M. L. Sadowski, S. Huant, F. H. Yang, M. Goiran, J. Leotin, and M. S. Shur, Appl. Phys. Lett. 70, 2123 (1997).
O. A. Klimenko, W. Knap, B. Iniguez, D. Coquillat, Y. A. Mityagin, F. Teppe, N. Dyakonova, H. Videlier, D. But, F. Lime, J. Marczewski, and K. Kucharski, J. Appl. Phys. 112, 014506 (2012).
R. Tauk, J. Lusakowski, W. Knap, A. Tiberj, Z. Bougrioua, M. Azize, P. Lorenzini, M. Sakowicz, K. Karpierz, C. Fenouillet-Beranger, M. Casse, C. Gallon, F. Boeuf, and T. Skotnicki, J. Appl. Phys. 102, 103701 (2007).
V. N. Alfeev, P. A. Bakhtin, A. A. Vasenkov, I. D. Voitovich, and V. I. Makhov, Integrated Circuits and Micro-electronic Devices with Superconductors (Radio Svyaz’, Moscow, 1985) [in Russian].
D. K. Schroder, Semiconductor Material and Device Characterisation (Wiley, New Jersey, 2006).
S. Noor Mohammad, J. Appl. Phys. 95, 7970 (2004).
S. Fernández, R. Peña, M. T. Rodrigo, J. Plaza, M. Verdú, F. J. Sánchez, and M. T. Montojo, Appl. Phys. Lett. 90, 083504 (2007).
F. A. Padovani and R. Stratton, Solid State Electron. 9, 695 (1966).
A. I. Anselm, Introduction to Semiconductor Theory (Prentice-Hall, Englewood Cliffs, 1981; Lan’, St.-Petersburg, 2008).
Contacts to Semiconductors. Fundamentals and Technology, Ed. by L. J. Brillson (Noyes Publications, Park Ridge, New Jersey, USA, 1993), p. 29.
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Original Russian Text © A.V. Sachenko, A.E. Belyaev, N.S. Boltovets, R.V. Konakova, L.M. Kapitanchuk, V.N. Sheremet, Yu.N. Sveshnikov, A.S. Pilipchuk, 2014, published in Fizika i Tekhnika Poluprovodnikov, 2014, Vol. 48, No. 10, pp. 1344–1347.
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Sachenko, A.V., Belyaev, A.E., Boltovets, N.S. et al. Mechanism of current flow in a Au-Ti-Al-Ti-n +-GaN ohmic contact in the temperature range of 4.2–300 K. Semiconductors 48, 1308–1311 (2014). https://doi.org/10.1134/S106378261410025X
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DOI: https://doi.org/10.1134/S106378261410025X