Abstract
The photoluminescence and electron spin resonance phenomena are studied at room temperature for pyrolytic silicon nitride films irradiated with argon ions or molecular nitrogen ions and annealed at temperatures in the range 500–1100°C. The absorption spectrum suggests that the broad photoluminescence band at 400–600 nm is due to electron transitions between the band tails. The low-dose irradiation with argon ions slightly reduces the photoluminescence intensity, whereas the high-dose irradiation followed by annealing at 800–900°C can induce a more than twofold increase in the intensity. At the same time, irradiation with nitrogen ions profoundly suppresses the integrated photoluminescence intensity that decreases by more than an order of magnitude. A correlation between the changes in the photoluminescence intensity and the amplitude of the ESR spectra on annealing of the silicon nitride films is observed.
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References
D. T. Krick, P. M. Lenahan, and J. Kanicki, Phys. Rev. B 38, 2826 (1988).
W. L. Warren, P. M. Lenahan, and S. E. Curry, Phys. Rev. Lett. 65, 207 (1990).
W. L. Warren and P. M. Lenahan, Phys. Rev. B 42, 1773 (1990).
W. L. Warren, J. Kanicki, J. Robertson, E. N. Poindexter, and P. J. McWhorter, J. Appl. Phys. 74, 4034 (1993).
S. V. Deshpande, E. Gulari, S. W. Brown, and S. C. Rand, J. Appl. Phys. 77, 15 (1995).
I. E. Tyschenko, V. A. Volodin, L. Rebole, M. Fel’skov, and V. Skorupa, Fiz. Tekh. Poluprovodn. 33, 559 (1999) [Semiconductors 33, 523 (1999)].
Kwang Soo Seol, Tsuyoshi Futami, Takashi Watanabe, Yoshimichi Ohki, and Makoto Takiyama, J. Appl. Phys. 85, 9 (1999).
G. Pacchioni and D. Erbetta, Phys. Rev. B 60, 12617 (1999).
Zhizhong Yuan, Dongsheng Li, Minghua Wang, Peiliang Chen, Daoren Gong, Lei Wang, and Deren Yang, J. Appl. Phys. 100, 083106 (2006).
Rui Huang, Kunji Chen, Peigao Han, Hengping Dong, Xiang Wang, Deyuan Chen, Wei Li, Jun Xu, Zhongyuan Ma, and Xinfan Huang, Appl. Phys. Lett. 90, 093515 (2007).
M. Molinari, H. Rinnert, and M. Vergnat, J. Appl. Phys. 101, 123532 (2007).
Tables of Physical Quantities. A Reference Book, Ed. by I. K. Kikoin (Mir, Moscow, 1976), p. 635 [in Russian].
V. I. Belyi, L. L. Vasil’eva, V. A. Gritsenko, et al., Silicon Nitride in Electronics, Ed. by A. V. Rzhanov (Novosibirsk, Nauka, 1982) [in Russian].
D. Jousse, J. Kanicki, and J. H. Stathis, Appl. Phys. Lett. 54, 1043 (1989).
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Original Russian Text © E.S. Demidov, N.A. Dobychin, V.V. Karzanov, M.O. Marychev, V.V. Sdobnyakov, 2009, published in Fizika i Tekhnika Poluprovodnikov, 2009, Vol. 43, No. 7, pp. 961–965.
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Demidov, E.S., Dobychin, N.A., Karzanov, V.V. et al. Electron spin resonance and photoluminescence in pyrolytic silicon nitride films irradiated with argon and molecular ions. Semiconductors 43, 929–933 (2009). https://doi.org/10.1134/S1063782609070203
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DOI: https://doi.org/10.1134/S1063782609070203