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AFM examination of nanolayers synthesised by the molecular layering method on the surface of manufacturing glasses

  • The 8th International Workshop on Beam Injection Assessment of Microstructures in Semiconductors, June 11–14, 2006, St. Petersburg, Russia
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Abstract

The surface topography of glass matrixes is investigated before and after oxide coatings caused by the molecular layering method. The conductance of synthesized nanolayers is investigated.

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Sosnov, E.A., Dorofeev, V.P., Malkov, A.A. et al. AFM examination of nanolayers synthesised by the molecular layering method on the surface of manufacturing glasses. Semiconductors 41, 498–501 (2007). https://doi.org/10.1134/S1063782607050028

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  • DOI: https://doi.org/10.1134/S1063782607050028

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