Abstract
This article presents results of synthesis using molecular layering of chromium oxide nanolayers on the surface of silicate matrices (quartz, glass, sitall). The influence of technological factors on composition is described, as well as the main regularities of formation and temperature stability of Cr(VI). Significant improvement of adhesive properties of vacuum deposited films of copper and aluminum on modified substrates is detected.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Maissel, L.I. and Glang, R., Handbook of Thin Film Technology, New York: McGraw-Hill, 1970.
Zimon, A.D., Adgeziya plenok i pokrytii (Adhesion of Films and Coatings), Moscow: Khimiya, 1973.
Deryagin, B.V., Krotova, N.A., and Smilga, V.P., Adgeziya tverdykh tel (Adhesion of Solids), Moscow: Nauka, 1973.
Aleskovskii, V.B., Chemical assembling of materials, Vestn. Akad. Nauk SSSR, 1975, no. 6, pp. 48–52.
Malygin, A.A., The method of molecular layering is the basis of chemical nanotechnology materials for solid electronics, Peterb. Zh. Elektron., 1996, vol. 69, no. 1 (10), pp. 22–28.
Yezhovskiy, Yu.K., Reactivity of oxide matrix surface during atomic layer deposition, Inorg. Mater.: Appl. Res., 2016, vol. 7, no. 1, pp. 24–28.
Puurunen, R.L., Surface chemistry of atomic layer deposition: a case study for the trimethylaluminum/ water process, J. Appl. Phys., 2005, vol. 97, no. 12, art. ID 121301.
Nefedov, V.I. and Cherepin, V.T., Fizicheskie metody issledovaniya poverkhnosti tverdykh tel (Physical Analysis of the Surface of Solids), Moscow: Nauka, 1983.
Nefedov, V.I., Rentgeno-elektronnaya spektroskopiya khimicheskikh soedinenii (X-ray and Electronic Spectrometry of Chemical Compounds), Moscow: Khimiya, 1984.
Wanger, C.D., Riggs, W.M., Davis, L.E., Moulder, J.F., and Muilenberg, G.E., Handbook of X-ray Photoelectron Spectroscopy, Eden Prairie, MN: Perkin-Elmer, 1979.
Azzam, R.M.A. and Bashara, N.M., Ellipsometry and Polarized Light, Amsterdam: North-Holland, 1979.
Gromov, V.K., Vvedenie v ellipsometriyu (Introduction to Ellipsometry), Leningrad: Leningr. Gos. Univ., 1986.
Holms, D.A., On the calculation of thin films refractive index and thickness by ellipsometry, Appl. Opt., 1967, vol. 6, no. 1, pp. 168–169.
Ryabin, A.V. and Kireeva, M.V., Neorganicheskie soedineniya khroma (Inorganic Compounds of Chromium), Leningrad: Khimiya, 1981.
Ripan, R. and Ceteanu, I., Manual de Lucrări Practice de Chimie Anorganică, Vol. 2: Chimia metalelor, Bucharest: Didactică Pedagogică, 1969.
Malygin, A.A. and Dubrovenskii, S.D., Quantumchemical approaches to identification of nanostructures synthesized by molecular layering technique, Russ. J. Gen. Chem., 2010, vol. 80, no. 3, pp. 643–657.
Gukova, A.N., Dubrovenskii, S.D., and Malygin, A.A., Quantum-chemical analysis and experimental study of the process of the silica surface interaction with the CrO2Cl2 and VOCl3 vapor mixture, Russ. J. Gen. Chem., 2010, vol. 80, no. 6, pp. 1168–1175.
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © Yu.K. Yezhovskiy, S.D. Dubrovenskii, 2017, published in Materialovedenie, 2017, No. 3, pp. 25–30.
Rights and permissions
About this article
Cite this article
Yezhovskiy, Y.K., Dubrovenskii, S.D. Preparation and Adhesive Properties of Chromium Oxide Nanolayers. Inorg. Mater. Appl. Res. 9, 9–13 (2018). https://doi.org/10.1134/S2075113318010124
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S2075113318010124