Skip to main content
SpringerLink
Log in

Effect of ion treatment on the structure and optical properties of nanocrystalline In2O3:Sn films

  • Published:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques Aims and scope Submit manuscript

Abstract

Transparent conductive films of indium oxide doped with tin have been obtained by the reactive RF-magnetron sputtering method with ion treatment of the specimen during film condensation. Ion treatment of the oxide surface during the sputtering process leads to the formation of a preferred crystallite orientation, a decrease in the size of the coherent reflection areas and an increase in the optical transparency window.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. T. V. Semikina and V. N. Komashchenko, Elektronika Svyaz’, no. 3, 20 (2010).

  2. Yu. P. Maishev, Electron. Promyshl., no. 5, 15 (1990).

  3. S. S. Alalykin and P. N. Krylov, Prib. Tekh. Eksp., no. 2, 149 (2005).

  4. A. Al-Saie, S. Arekat, A. Jaafar, and M. Bououdina, Int. J. Nanopart. 2, 502 (2009).

    Article  CAS  Google Scholar 

  5. M. Girtan and G. I. Rusu, Ann. Sci. Univ. Al.I. Guza Din iasi, Fiz. St. Cond. 45–46, 166 (1999–2000).

    Google Scholar 

  6. A. N. Zakharov, K. V. Oskomov, S. V. Rabotkin, et al., Tech. Phys. 55, 719 (2010).

    Article  CAS  Google Scholar 

  7. R. A. Ismail, D. N. Raouf, and D. F. Raouf, J. Optoelectron. Adv. Mater. 8, 1443 (2006).

    CAS  Google Scholar 

  8. V. N. Katerinchuk and M. Z. Kovalyuk, Semiconductors 44, 1176 (2010).

    Article  Google Scholar 

  9. I. P. Suzdalev, Nanotechnology: Physicochemistry of Clusters, Nanostructures and Nanomaterials (Komkniga, Moscow, 2006) [in Russian].

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Udmurt State University, Izhevsk, Russia

    V. M. Vetoshkin, R. M. Zakirova, N. V. Kostenkov & P. N. Krylov

Authors
  1. V. M. Vetoshkin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. R. M. Zakirova
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. N. V. Kostenkov
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. P. N. Krylov
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Original Russian Text © V.M. Vetoshkin, R.M. Zakirova, N.V. Kostenkov, P.N. Krylov, 2012, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2012, No. 2, pp. 17–20.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Vetoshkin, V.M., Zakirova, R.M., Kostenkov, N.V. et al. Effect of ion treatment on the structure and optical properties of nanocrystalline In2O3:Sn films. J. Surf. Investig. 6, 111–114 (2012). https://doi.org/10.1134/S1027451012020176

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1027451012020176

Keywords

Search

Navigation