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Preparation and characterization of highly transparent and conductive indium-zinc oxide thin films deposited by pyrolysis spray technique

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Abstract

Ternary compound films of ZnO–In2O3 system were prepared by spray pyrolysis method. The films were deposited on heated glass substrates by pyrolytic decomposition of zinc chloride and indium chloride in distilled water with different ratio x of [Zn] to [Zn + In] (x = [Zn]/[Zn + In]). The phase change, chemical composition, electrical and optical properties of the Zn–In oxides were investigated over wide range of ratio x. Quasi-amorphous sub-oxide films with thickness of 200–400 nm were first obtained, the films were then annealed in Argon atmosphere at 550 °C for 1 h. To optimize the physical properties of sprayed ZnO–In2O3 thin films, we carry out on a systematic study of their microstructural characterization and transport properties. Continuous structural variation from In2O3 to ZnO through Zn2In2O5 and Zn3In2O6 was observed on the deposited films with increasing the ratio x. Maximum of conductivity of 1.47 × 103 Ω−1 cm−1 was reached for x = 0.5 (at.%). We also concluded that the transport properties of the films are greatly governed by their microstructure.

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Acknowledgments

Thanks are due to Drs H. Bougharraf, A. Kachouane and A. Bougrine for their fruitful cooperation.

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Authors and Affiliations

  1. Département de Physique, Faculté des Science, Laboratoire des Sciences de l’Ingénieur et Modélisation, Kenitra, Morocco

    R. Dounia

  2. Faculty of Mathematics and Natural Sciences, J. Dlugosz Academy of Czestochowa, Institute of Physics, Al. Armii Krajowej 13/15, Czestochowa, Poland

    A. Migalska-Zalas

  3. Département de Physique, Faculté des Science, Laboratoire d’Optoélectronique, de Physico-chimie des Matériaux et Environnement, Kenitra, Morocco

    M. Addou

  4. Equipe de Physique des Solides pour l’Electronique, Groupe Couches Minces et Matériaux Nouveaux, FSTN, Université de Nantes, 2 rue la Houssinière, BP 9209, 44322, Nantes Cedex, France

    J. C. Bernede

  5. Faculté des Sciences Semlalia, Laboratoire de Physique du Solide et des Couches Minces, Bvd du Prince Moulay Abdellah, BP S15, Marrakech, Morocco

    A. Outzourhit

  6. Laboratoire de Génie des Systèmes Electriques et Réseaux des Télécommunications, Ecole Nationale des Sciences Appliquées de Kénitra, Université Ibn Tofail, Kenitra, Morocco

    M. Benbrahim

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  1. R. Dounia
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  2. A. Migalska-Zalas
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  3. M. Addou
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  4. J. C. Bernede
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  5. A. Outzourhit
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Corresponding authors

Correspondence to R. Dounia or A. Migalska-Zalas.

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This article is part of the Topical Collection on Advanced Materials for Photonics and Electronics.

Guest Edited by Bouchta Sahraoui, Yahia Boughaleb, Kariem Arof, Anna Zawadzka.

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Dounia, R., Migalska-Zalas, A., Addou, M. et al. Preparation and characterization of highly transparent and conductive indium-zinc oxide thin films deposited by pyrolysis spray technique. Opt Quant Electron 48, 339 (2016). https://doi.org/10.1007/s11082-016-0596-9

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